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Surface acoustic wave (SAW)-based sensors, with InO_x and SiN_x layers on 36° YX LiTaO₃ substrates were investigated for the detection of hydrogen (H₂) and ozone (O₃) gases at different operating temperatures. SiN_x films with different thicknesses were deposited using the plasma enhanced chemical vapour deposition (PECVD) method. The InO_x sensing layer was deposited using an rf magnetron sputterer. The sensors’ performance was analyzed in terms of their frequency shifts as a function of different gas concentrations. The chemical–physical characterization of the deposited films was carried out by X-ray photoelectron spectroscopy (XPS). High sensitivities and excellent repeatabilities were observed towards both gases.