作者
Stevan S Djordjevic, Lian Wee Luo, Salah Ibrahim, Nicolas K Fontaine, CB Poitras, Binbin Guan, Linje Zhou, Katsunari Okamoto, Zhi Ding, Michal Lipson, SJB Yoo
发表日期
2010/11/9
期刊
IEEE Photonics Technology Letters
卷号
23
期号
1
页码范围
42-44
出版商
IEEE
简介
We present a fully reconfigurable optical filter built by cascading four identical unit cells. The devices are fabricated using two distinct methods: a complementary metal-oxide-semiconductor (CMOS) compatible process utilizes deep ultraviolet (DUV) lithography with tuning elements defined by ion implantation to make lateral p-i-n diodes for current injection regions, while an electron beam (E-beam) lithography process uses nickel chrome (NiCr) heaters as tuning elements. The fabricated devices are characterized using swept optical vector network analyzer (OVNA) coherent measurements.
引用总数
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学术搜索中的文章
SS Djordjevic, LW Luo, S Ibrahim, NK Fontaine… - IEEE Photonics Technology Letters, 2010