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A terrestrial laser scanner measures the distance to an object surface with a precision in the order of millimeters. The quality of the individual points in a point cloud, although directly affecting standard processing steps like point cloud registration and segmentation, is still not well understood. The quality of a scan point is influenced by four major factors: instrument mechanism, atmospheric conditions, object surface properties and scan geometry. In this paper, the influence of the scan geometry on the individual point precision or local measurement noise is considered. The local scan geometry depends on the distance and the orientation of the scanned surface, relative to the position of the scanner. The local scan geometry is parameterized by two main parameters, the range, i.e. the distance from the object to the scanner and the incidence angle, i.e. the angle between incoming laser beam and the local surface …