作者
Hongqiang Li, Wenqian Zhou, Yu Liu, Xiaye Dong, Cheng Zhang, Changyun Miao, Meiling Zhang, Enbang Li, Chunxiao Tang
发表日期
2014/5/6
期刊
Scientific reports
卷号
4
期号
1
页码范围
4848
出版商
Nature Publishing Group UK
简介
An arrayed waveguide grating (AWG) demodulation integration microsystem is investigated in this study. The system consists of a C-band on-chip LED, a 2 × 2 silicon nanowire-based coupler, a fiber Bragg grating (FBG) array, a 1 × 8 AWG and a photoelectric detector array. The coupler and AWG are made from silicon-on-insulator wafers using electron beam exposure and response-coupled plasma technology. Experimental results show that the excess loss in the MMI coupler with a footprint of 6 × 100 μm2 is 0.5423 dB. The 1 × 8 AWG with a footprint of 267 × 381 μm2 and a waveguide width of 0.4 μm exhibits a central channel loss of −3.18 dB, insertion loss non-uniformity of −1.34 dB and crosstalk level of −23.1 dB. The entire system is preliminarily tested. Wavelength measurement precision is observed to reach 0.001 nm. The wavelength sensitivity of each FBG is between 0.04 and 0.06 nm/dB.
引用总数
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