作者
Youcef A Bioud, Abderraouf Boucherif, Ali Belarouci, Etienne Paradis, Simon Fafard, Vincent Aimez, Dominique Drouin, Richard Arès
发表日期
2017/4/1
期刊
Electrochimica Acta
卷号
232
页码范围
422-430
出版商
Pergamon
简介
Mesoporous germanium (MP-Ge) has been predicted to play an important role in a wide range of potential applications. These porous Ge networks are characterized by physical and chemical properties that contrast with their bulk counterpart. For more than two decades, the methods that were used to synthesize these materials were extremely slow and yield non-uniform layers, which limit their applications. Here we demonstrate the synthesis of thick MP-Ge films with high growth rate (up to 300 nm/min) by using high-current density and high-frequency bipolar electrochemical etching. An optimized nucleation procedure is also reported. It enables a much better lateral homogeneity of the MP-Ge films. Following these results a refined electrochemical Ge etching model is proposed. The model is confirmed by Fourier Transform Infrared Spectroscopy and Cyclic Voltammetry measurements. Reflectivity measurements …
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