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Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods of equipment data acquisition (EDA). Prior work shows that the lack of precise time-stamping and clock synchronization is a critical hindrance to reliable data acquisition and real-time process control systems. The ultimate goal in the development of EDA standards for performance is to meet industry demands such as modularity, reconfigurability, decentralization, interoperability and low cost. While precision in timing addresses some of these requirements, the need for scalable modularity, flexibility and lower cost is also responsible for a recent interest in performing EDA functions over wireless networks. This paper presents an analysis of data acquisition and clock synchronization performance over a wireless network. Clock synchronization …