作者
Ya-Shian Li-Baboud, Xiao Zhu, Dhananjay Anand, Sulaiman Hussaini, James Moyne
发表日期
2008/9/22
研讨会论文
Precision Clock Synchronization for Measurement, Control and Communication, 2008. ISPCS 2008. IEEE International Symposium on
页码范围
77-82
出版商
IEEE
简介
The ability to acquire quality equipment and process data is important for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator has been developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator is used to identify and explore methods to mitigate the latencies and provide guidance on accurate time-stamping for equipment data acquisition systems.
学术搜索中的文章
YS Li-Baboud, X Zhu, D Anand, S Hussaini, J Moyne - 2008 IEEE International Symposium on Precision …, 2008