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A novel premixed swirl flame in stagnation point geometry is used to synthesize uniform, high-quality nanostructured TiO₂ films at growth rates of 20–200nm/s in a single step. The roles of precursor concentration and substrate temperature in controlling film morphology and characteristics are investigated. Increasing precursor concentration, for a given substrate temperature, significantly increases the packing density of the nanoporous film. The specific surface area of the film is mainly dependent on substrate temperature, where two distinct regimes, i.e. in-flame-agglomeration at low temperature and on-substrate-sintering at high temperature, specify film properties. A simplified deposition model for the formation of the nanoporous film structure is proposed, correlating penetration distance of thermophoretically-driven Brownian particles into the film with the resultant morphology. The model predicts the packing …