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A comparative analysis of the residual stress distributions across the conductive channel of Ga-face AlGaN/GaN high electron mobility transistors (HEMTs) is presented. Stress was measured by means of micro-Raman spectroscopy and micro-photoluminescence (PL). Raman measurements probed the volume average of the stress through the GaN layer whereas the stress near the GaN surface (AlGaN/GaN heterointerface) was acquired via PL. By combining Raman, PL, and x-ray diffraction, a self-consistent method was developed to accurately determine the variation in magnitude of stress throughout the thickness of the GaN layer. Based on this framework, it is observed in AlGaN/GaN HEMTs that a depth variation in the GaN residual stress occurs near the gate and ohmic electrodes. At these regions, the stress near the AlGaN/GaN interface (or GaN surface) exhibits a tensile shift compared to the stress …