作者
Luiz Gonc¸ alves Neto, Patricia Soares Pinto Cardona, Giuseppe Antonio Cirino, Ronaldo Domingues Mansano, Patrick Verdonck
发表日期
2003/4/1
期刊
Journal of Micro/Nanolithography, MEMS and MOEMS
卷号
2
期号
2
页码范围
96-104
出版商
Society of Photo-Optical Instrumentation Engineers
简介
The use of diffractive optical elements (DOEs) is increasing for several industrial applications. Most elements modulate the phase of incoming light or its amplitude, but not both. The phase modulation DOE is the most popular because it has a high diffraction efficiency. However, the phase-only limitation may reduce the freedom in the element design, increasing the design complexity for a desired optimal solution. To overcome this limitation, a novel, full complex-amplitude modulation DOE is presented. This element allows full control over both phase and amplitude modulation of any optical wave front. This flexibility introduces more freedom in the element design and improves the element’s optical performance, even in a near-field operation regime. The phase grating of the element was fabricated in an amorphous hydrogenated carbon film. The amplitude modulation was obtained by patterning a reflective …
引用总数
2003200420052006200720082009201020112012201320142015201620172018201920202021202220232024121112321221231
学术搜索中的文章
LG Neto, PSP Cardona, GA Cirino, RD Mansano… - Journal of Micro/Nanolithography, MEMS and MOEMS, 2003