作者
Laura Fumagalli, G Gramse, D Esteban-Ferrer, MA Edwards, G Gomila
发表日期
2010/5/3
期刊
Applied Physics Letters
卷号
96
期号
18
出版商
AIP Publishing
简介
Quantitative measurement of the low-frequency dielectric constants of thick insulators at the nanoscale is demonstrated utilizing ac electrostatic force microscopy combined with finite-element calculations based on a truncated cone with hemispherical apex probe geometry. The method is validated on muscovite mica, borosilicate glass, poly (ethylene naphthalate), and poly (methyl methacrylate). The dielectric constants obtained are essentially given by a nanometric volume located at the dielectric-air interface below the tip, independently of the substrate thickness, provided this is on the hundred micrometer-length scale, or larger.
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