作者
Nicholas A Lanzillo, Prasad Bhosale, Christian Lavoie, Daniel J Dechene, Robert R Robison, Kisik Choi
发表日期
2019/9/18
期刊
Journal of Physics D: Applied Physics
卷号
52
期号
49
页码范围
495302
出版商
IOP Publishing
简介
We use state-of-the-art ab initio simulation methods to study fundamental electron scattering mechanisms in cobalt conductors for applications in advanced interconnect technology. In particular, we consider electron scattering at intrinsic defect sites, twin grain boundaries, and at the Co/metal/Co interfaces present in vertical interconnects. Effective resistivity values and reflection coefficients are calculated in each case. The explicit treatment of electron spin results in distinct majority and minority spin behavior, with majority spin states exhibiting less scattering than minority states. Our results indicate that grain boundary scattering dominates over scattering at intrinsic point defect sites. Vertical resistance calculations indicate that Co vias can have substantially lower resistance than corresponding Cu vias at comparable dimensions. These results help build a fundamental understanding of electron scattering …
引用总数
2020202120222023202442161
学术搜索中的文章
NA Lanzillo, P Bhosale, C Lavoie, DJ Dechene… - Journal of Physics D: Applied Physics, 2019