作者
Chukun Huang, Haotian Shi, Linfeng Yu, Kang Wang, Ming Cheng, Qiang Huang, Wenting Jiao, Junqiang Sun
发表日期
2022/3
期刊
Advanced Optical Materials
卷号
10
期号
6
页码范围
2102334
简介
Aluminum scandium nitride (AlScN) has attracted extensive attention for its excellent piezoelectric properties in the micro‐electromechanical system applications. In this work, AlScN is demonstrated to be a promising candidate for on‐chip acousto‐optic coupling interactions with outstanding piezoelectric properties as well. Based on piezoelectric Al0.6Sc0.4N film deposited on silicon‐on‐insulator platform, the proposed devices exhibit impressive acousto‐optic coupling performances over a short interaction length of 210 µm with surface acoustic waves actuated by interdigital transducers. Meanwhile, the acousto‐optic coupling performances are further improved in a compact spiral waveguide with eight interaction segments, where the measured modulation efficiency is enhanced from −21.5 to −12.5 dB and the radiofrequency (RF) 3‐dB bandwidth is narrowed from 4 to 3.1 MHz at central frequency of 3.044 GHz …
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