作者
Melanie V Kessels, Marwa El Bouz, Robin Pagan, Kevin Heggarty
发表日期
2007/8/6
期刊
Journal of Micro/Nanolithography, MEMS and MOEMS
卷号
6
期号
3
页码范围
033002-033002-12
简介
A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.
引用总数
200820092010201120122013201420152016201720182019202020212022202320243334114117834232
学术搜索中的文章