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A numerical model to treat the kinetics of vacancy annihilation at the metal/oxide interface but also in the bulk metal has been implemented. This was done using EKINOX, which is a mesoscopic scale 1D-code that simulates oxide growth kinetics with explicit calculation of vacancy fluxes. Calculations were performed for high temperature Ni–Cr alloys oxidation forming a single chromia scale. The kinetic parameters used to describe the diffusion in the alloy were directly derived from an atomistic model. Our results showed that the Cr depletion profile can be strongly affected by the cold work state of the alloy. In fact, the oversaturation of vacancies is directly linked to the efficiency of the sinks which is proportional to the density of dislocations. The resulting vacancy profile highlights a supersaturation of vacancy within the metal. Based on the classical nucleation theory, the possibility and the rate of void …