作者
Wentao Jiang, Felix M Mayor, Rishi N Patel, Timothy P McKenna, Christopher J Sarabalis, Amir H Safavi-Naeini
发表日期
2020/9/4
期刊
Communications Physics
卷号
3
期号
1
页码范围
156
出版商
Nature Publishing Group UK
简介
Tuning and reconfiguring of nanophotonic components are needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they suffer from trade-offs between tuning voltage, tuning range, and on-chip area. Piezoelectric actuation could resolve these challenges, but only pm-per-volt scale wavelength tunability has been achieved. Here we propose and demonstrate compact piezoelectric actuators, called nanobenders, that transduce tens of nanometers per volt. By leveraging the non-uniform electric field from submicron electrodes, we generate bending of a piezoelectric nanobeam. Combined with a sliced photonic crystal cavity to sense displacement, we show tuning of an optical resonance by ~ 5 nm V−1 (0.6 THz V−1) and between 1520 ~ 1560 nm (~ 400 linewidths) within 4 V. Finally, we …
引用总数
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