作者
Fatima Adly, Paul D Yoo, Sami Muhaidat, Yousof Al-Hammadi, Uihyoung Lee, Mohammed Ismail
发表日期
2015/2/24
期刊
IEEE Transactions on Semiconductor Manufacturing
卷号
28
期号
2
页码范围
145-152
出版商
IEEE
简介
Defect detection and classification in semiconductor wafers has received an increasing attention from both industry and academia alike. Wafer defects are a serious problem that could cause massive losses to the companies' yield. The defects occur as a result of a lengthy and complex fabrication process involving hundreds of stages, and they can create unique patterns. If these patterns were to be identified and classified correctly, then the root of the fabrication problem can be recognized and eventually resolved. Machine learning (ML) techniques have been widely accepted and are well suited for such classification-/identification problems. However, none of the existing ML model's performance exceeds 96% in identification accuracy for such tasks. In this paper, we develop a state-of-the-art classifying algorithm using multiple ML techniques, relying on a general-regression-network-based consensus learning …
引用总数
20152016201720182019202020212022202320241443111575107
学术搜索中的文章
F Adly, PD Yoo, S Muhaidat, Y Al-Hammadi, U Lee… - IEEE Transactions on Semiconductor Manufacturing, 2015