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The ability to predict the micro-scale strength and plasticity of fused-silica micro-components is crucial as their miniaturization and applications in harsh environments advance. This study focusses on the micro-mechanical behavior of fused silica micropillars at high temperatures and variable strain rates. 160 micropillars with a diameter of 1.6 µm have been tested at temperatures between −120 °C and 600 °C and strain rates between 10^-3 s⁻¹ and 1 s⁻¹, which are to date unexplored conditions. Between −120 °C and 300 °C, the yield strengths (6–8 GPa) and strain rate sensitivities (≤0.03) vary only marginally. However, at 600 °C, a significant decrease in yield strength by more than 50 % (2.5–4.5 GPa) and an increase in strain rate sensitivity by a factor of 3 (0.09) is observed. Post-compression synchrotron-based ptychographic X-ray computed tomography (PXCT) on plastically deformed micropillars revealed a …