作者
ИШ Невлюдов, НГ Стародубцев, СИ Теслюк
发表日期
2016
期刊
Технология приборостроения
期号
1
页码范围
3-6
出版商
Научно-исследовательский технологический институт приборостроения
简介
Modelling of process of the automated control of processing of a semi-conductor plate. In present clause process of construction of model of installation of the automated control of processing of a semi-conductor plate is described, the structure and the brief description of model, process of its construction, and also procedure of configuration of model are resulted. Also in clause processes of preparation for modelling and process of modelling are considered.
学术搜索中的文章
ИШ Невлюдов, НГ Стародубцев, СИ Теслюк - Технология приборостроения, 2016