作者
Girija Sravani Kondaveeti, Koushik Guha, Srinivasa Rao Karumuri, Ameen Elsinawi
发表日期
2019/10
期刊
IET Circuits, Devices & Systems
卷号
13
期号
7
页码范围
1093-1101
出版商
The Institution of Engineering and Technology
简介
This study reports the design and analysis of novel step structure RF micro‐electromechanical system (MEMS) switch for low pull‐in voltage, low insertion loss and high isolation by using uniform single meander. The central beam of the membrane is designed with 0.5 µm lower than the side beams to form a step‐down structure which reduces the pull‐in voltage. Stress analysis, electromechancial, switching time, quality factor and RF analysis have done to understand the behavioural characteristics of the proposed step‐down switch. The analysis has been carried out for different beam and dielectric materials among them switch with gold material exhibits low pull‐in voltage of 4.7 V, low insertion loss <1 dB and high isolation of −38.3 dB at 28.2 GHz for silicon nitride. The switch also shows good quality factor of 0.95 for gold material along with high capacitance ratio of 132. The upstate capacitance of 56.8 pF …
引用总数
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