Non-silicon MEMS platforms for gas sensors AA Vasiliev, AV Pisliakov, AV Sokolov, NN Samotaev, SA Soloviev, ... Sensors and Actuators B: Chemical 224, 700-713, 2016 | 104 | 2016 |
Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate D Vincenzi, MA Butturi, V Guidi, MC Carotta, G Martinelli, V Guarnieri, ... Sensors and Actuators B: Chemical 77 (1-2), 95-99, 2001 | 74 | 2001 |
Batch fabrication of metal oxide sensors on micro-hotplates E Barborini, S Vinati, M Leccardi, P Repetto, G Bertolini, O Rorato, ... Journal of Micromechanics and Microengineering 18 (5), 055015, 2008 | 70 | 2008 |
Stress characterization of electroplated gold layers for low temperature surface micromachining B Margesin, A Bagolini, V Guarnieri, F Giacomozzi, A Faes, R Pal, ... Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 …, 2003 | 66 | 2003 |
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies D Vincenzi, MA Butturi, V Guidi, MC Carotta, G Martinelli, V Guarnieri, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 52 | 2000 |
Linear temperature microhotplate gas sensor array for automotive cabin air quality monitoring L Francioso, A Forleo, AM Taurino, P Siciliano, L Lorenzelli, V Guarnieri, ... Sensors and Actuators B: Chemical 134 (2), 660-665, 2008 | 49 | 2008 |
Development of a gas chromatography silicon-based microsystem in clinical diagnostics L Lorenzelli, A Benvenuto, A Adami, V Guarnieri, B Margesin, V Mulloni, ... Biosensors and Bioelectronics 20 (10), 1968-1976, 2005 | 48 | 2005 |
Platinum metallization for MEMS application: Focus on coating adhesion for biomedical applications V Guarnieri, L Biazi, R Marchiori, A Lago Biomatter 4 (1), e28822, 2014 | 44 | 2014 |
Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques D Vincenzi, MA Butturi, M Stefancich, C Malagù, V Guidi, MC Carotta, ... Thin Solid Films 391 (2), 288-292, 2001 | 41 | 2001 |
Fabrication of PIN diode detectors on thinned silicon wafers S Ronchin, M Boscardin, GF Dalla Betta, P Gregori, V Guarnieri, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2004 | 35 | 2004 |
Sensors based on technology “nano-on-micro” for wireless instruments preventing ecological and industrial catastrophes A Vasiliev, R Pavelko, S Gogish-Klushin, D Kharitonov, ... Sensors for Environment, Health and Security: Advanced Materials and …, 2009 | 32 | 2009 |
Microstructures etched in doped TMAH solutions S Brida, A Faes, V Guarnieri, F Giacomozzi, B Margesin, M Paranjape, ... Microelectronic engineering 53 (1-4), 547-551, 2000 | 27 | 2000 |
Indocyanine green videoangiography using cooled charge-coupled devices in central serous choroidopathy C Ciamberlini, V Guarnieri, G Longobardi, P Poggi, MC Donati, ... Journal of biomedical optics 2 (2), 218-225, 1997 | 26 | 1997 |
A WO3-based gas sensor array with linear temperature gradient for wine quality monitoring A Adami, L Lorenzelli, V Guarnieri, L Francioso, A Forleo, G Agnusdei, ... Sensors and Actuators B: Chemical 117 (1), 115-122, 2006 | 25 | 2006 |
Integration of a technique for the deposition of nanostructured films with MEMS-based microfabrication technologies: application to micro gas sensors M Decarli, L Lorenzelli, V Guarnieri, E Barborini, S Vinati, C Ducati, ... Microelectronic Engineering 86 (4-6), 1247-1249, 2009 | 16 | 2009 |
Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples S Pelegrini, A Adami, C Collini, P Conci, CIL de Araújo, V Guarnieri, ... Microsystem technologies 20, 585-592, 2014 | 15 | 2014 |
Gas sensor system for the determination of methane in water AA Vasiliev, AV Pisliakov, AV Sokolov, OV Polovko, NN Samotaev, ... Procedia Engineering 87, 1445-1448, 2014 | 15 | 2014 |
RF sputtering of ZnO films in Ar and Ar–H2 gas mixtures: Role of H incorporation in developing transparent conductive coatings G Gottardi, R Bartali, V Micheli, V Guarnieri, I Luciu, P Pu, R Pandiyan, ... Surface and Coatings Technology 205, S218-S222, 2011 | 13 | 2011 |
A low-cost microsystem for noninvasive uroflowmetry N Viarani, N Massari, M Gottardi, A Simoni, B Margesin, A Faes, M Decarli, ... IEEE transactions on instrumentation and measurement 55 (3), 964-971, 2006 | 13 | 2006 |
Membrane-type gas sensor with thick film sensing layer: optimization of heat losses AA Vasiliev, AV Pisliakov, M Zen, B Margesin, V Guamieri, F Giacomozzi, ... Eurosensors XIV, The 14th European Conference on Solid-State Transducers …, 2000 | 11 | 2000 |