Effect of low intensity laser interaction with human skin fibroblast cells using fiber-optic nano-probes G Pal, A Dutta, K Mitra, MS Grace, A Amat, TB Romanczyk, X Wu, ... Journal of Photochemistry and Photobiology B: Biology 86 (3), 252-261, 2007 | 91 | 2007 |
Cavity Ignition and Flameholding of Ethylene-Air and Hydrogen-Air Flows by a Repetitively Pulsed Nanosecond Discharge A Dutta, Z Yin, IV Adamovich AIAA 48th Aerospace Sciences Meeting and Exhibit, 2010 | 41 | 2010 |
Method of forming barrier free contact for metal interconnects A Dutta, EA De Silva, J Church, LM Thompson US Patent 10,879,107, 2020 | 15 | 2020 |
Formation of embedded magnetic random-access memory devices A Dutta, CC Yang, JC Arnold, M Rizzolo, J Slaughter US Patent 10,707,413, 2020 | 13 | 2020 |
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features A Dutta, J Church, J Lee, B O’Brien, L Meli, CC Liu, S Sharma, K Petrillo, ... Extreme Ultraviolet (EUV) Lithography XI 11323, 213-224, 2020 | 12 | 2020 |
Inorganic hardmask development for extreme ultraviolet patterning A De Silva, A Dutta, L Meli, Y Yao, Y Mignot, J Guo, NM Felix Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (1), 011004-011004, 2019 | 10 | 2019 |
Cavity Flow Ignition and Flameholding in Ethylene-Air by a Repetitively Pulsed Nanosecond Discharge A Dutta, I Choi, M Uddi, E Mintusov, A Erofeev, Z Yin, W Lempert, ... AIAA 47th Aerospace Sciences Meeting and Exhibit, 2009 | 10 | 2009 |
Formation of embedded magnetic random-access memory devices with multi-level bottom electrode via contacts A Dutta, JC Arnold, CC Yang, TE Standaert US Patent 10,833,257, 2020 | 9 | 2020 |
Nanosecond Pulse Burst Ignition of Ethylene and Acetylene by Uniform Low-Temperature Plasmas E Mintusov, M Nishihara, N Jiang, I Choi, M Uddi, A Dutta, WR Lempert, ... AIAA 39th Plasmadynamics and Laser Conference, 2008 | 8 | 2008 |
MRAM integration with BEOL interconnect including top via A Dutta, CC Yang, EA De Silva, D Metzler US Patent 11,227,892, 2022 | 7 | 2022 |
First experimental demonstration of MRAM data scrubbing: 80 Mb MRAM with 40 nm junctions for last level cache applications H Wu, V Katragadda, E Evarts, E Edwards, R Southwick, A Dutta, G Lauer, ... 2021 IEEE International Electron Devices Meeting (IEDM), 2.3. 1-2.3. 4, 2021 | 6 | 2021 |
Multi-layer encapsulation to enable endpoint-based process control for embedded memory fabrication A Dutta, IC Chu, S Nguyen, M Rizzolo, JC Arnold US Patent 10,957,850, 2021 | 6 | 2021 |
Inorganic hardmask development for EUV patterning A De Silva, A Dutta, L Meli, Y Yao, Y Mignot, J Guo, NM Felix Extreme Ultraviolet (EUV) Lithography IX 10583, 206-220, 2018 | 6 | 2018 |
Transferring euv resist pattern to eliminate pattern transfer defectivity A Dutta, Y Xu, EA De Silva US Patent App. 15/976,285, 2019 | 5 | 2019 |
Patterning material challenges for improving EUV stochastics A De Silva, L Meli, J Guo, A Dutta, DL Goldfarb, J Church, NM Felix Journal of Photopolymer Science and Technology 32 (1), 169-177, 2019 | 5 | 2019 |
AIAA Paper 2008-3899 E Mintusov, M Nishihara, N Jiang, I Choi, M Uddi, A Dutta, WR Lempert, ... 39th AIAA Plasmadynamics and Lasers Conference, Seattle, WA, 2008 | 5 | 2008 |
MRAM device formation with controlled ion beam etch of MTJ A Dutta, CC Yang, L Zou, J Arnold US Patent 11,158,786, 2021 | 4 | 2021 |
Hardmask stress, grain, and structure engineering for advanced memory applications M Rizzolo, A Dutta, O van der Straten, CC Yang US Patent 10,672,611, 2020 | 4 | 2020 |
Fluorescence life time imaging from neurons and subcellular components during low intensity laser therapy using fiber-optic nano-probes A Dutta, G Pal, K Mitra, M Grace, I Ilev, E Gorman, R Waynant, ... Lasers in Surgery and Medicine, 11-11, 2006 | 4 | 2006 |
Selective patterning of vias with hardmasks JC Arnold, A Dutta, D Metzler, TM Philip, S Mukesh US Patent 11,276,607, 2022 | 3 | 2022 |