关注
Ashim Dutta
Ashim Dutta
IBM Research
在 ibm.com 的电子邮件经过验证
标题
引用次数
引用次数
年份
Effect of low intensity laser interaction with human skin fibroblast cells using fiber-optic nano-probes
G Pal, A Dutta, K Mitra, MS Grace, A Amat, TB Romanczyk, X Wu, ...
Journal of Photochemistry and Photobiology B: Biology 86 (3), 252-261, 2007
912007
Cavity Ignition and Flameholding of Ethylene-Air and Hydrogen-Air Flows by a Repetitively Pulsed Nanosecond Discharge
A Dutta, Z Yin, IV Adamovich
AIAA 48th Aerospace Sciences Meeting and Exhibit, 2010
412010
Method of forming barrier free contact for metal interconnects
A Dutta, EA De Silva, J Church, LM Thompson
US Patent 10,879,107, 2020
152020
Formation of embedded magnetic random-access memory devices
A Dutta, CC Yang, JC Arnold, M Rizzolo, J Slaughter
US Patent 10,707,413, 2020
132020
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
A Dutta, J Church, J Lee, B O’Brien, L Meli, CC Liu, S Sharma, K Petrillo, ...
Extreme Ultraviolet (EUV) Lithography XI 11323, 213-224, 2020
122020
Inorganic hardmask development for extreme ultraviolet patterning
A De Silva, A Dutta, L Meli, Y Yao, Y Mignot, J Guo, NM Felix
Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (1), 011004-011004, 2019
102019
Cavity Flow Ignition and Flameholding in Ethylene-Air by a Repetitively Pulsed Nanosecond Discharge
A Dutta, I Choi, M Uddi, E Mintusov, A Erofeev, Z Yin, W Lempert, ...
AIAA 47th Aerospace Sciences Meeting and Exhibit, 2009
102009
Formation of embedded magnetic random-access memory devices with multi-level bottom electrode via contacts
A Dutta, JC Arnold, CC Yang, TE Standaert
US Patent 10,833,257, 2020
92020
Nanosecond Pulse Burst Ignition of Ethylene and Acetylene by Uniform Low-Temperature Plasmas
E Mintusov, M Nishihara, N Jiang, I Choi, M Uddi, A Dutta, WR Lempert, ...
AIAA 39th Plasmadynamics and Laser Conference, 2008
82008
MRAM integration with BEOL interconnect including top via
A Dutta, CC Yang, EA De Silva, D Metzler
US Patent 11,227,892, 2022
72022
First experimental demonstration of MRAM data scrubbing: 80 Mb MRAM with 40 nm junctions for last level cache applications
H Wu, V Katragadda, E Evarts, E Edwards, R Southwick, A Dutta, G Lauer, ...
2021 IEEE International Electron Devices Meeting (IEDM), 2.3. 1-2.3. 4, 2021
62021
Multi-layer encapsulation to enable endpoint-based process control for embedded memory fabrication
A Dutta, IC Chu, S Nguyen, M Rizzolo, JC Arnold
US Patent 10,957,850, 2021
62021
Inorganic hardmask development for EUV patterning
A De Silva, A Dutta, L Meli, Y Yao, Y Mignot, J Guo, NM Felix
Extreme Ultraviolet (EUV) Lithography IX 10583, 206-220, 2018
62018
Transferring euv resist pattern to eliminate pattern transfer defectivity
A Dutta, Y Xu, EA De Silva
US Patent App. 15/976,285, 2019
52019
Patterning material challenges for improving EUV stochastics
A De Silva, L Meli, J Guo, A Dutta, DL Goldfarb, J Church, NM Felix
Journal of Photopolymer Science and Technology 32 (1), 169-177, 2019
52019
AIAA Paper 2008-3899
E Mintusov, M Nishihara, N Jiang, I Choi, M Uddi, A Dutta, WR Lempert, ...
39th AIAA Plasmadynamics and Lasers Conference, Seattle, WA, 2008
52008
MRAM device formation with controlled ion beam etch of MTJ
A Dutta, CC Yang, L Zou, J Arnold
US Patent 11,158,786, 2021
42021
Hardmask stress, grain, and structure engineering for advanced memory applications
M Rizzolo, A Dutta, O van der Straten, CC Yang
US Patent 10,672,611, 2020
42020
Fluorescence life time imaging from neurons and subcellular components during low intensity laser therapy using fiber-optic nano-probes
A Dutta, G Pal, K Mitra, M Grace, I Ilev, E Gorman, R Waynant, ...
Lasers in Surgery and Medicine, 11-11, 2006
42006
Selective patterning of vias with hardmasks
JC Arnold, A Dutta, D Metzler, TM Philip, S Mukesh
US Patent 11,276,607, 2022
32022
系统目前无法执行此操作,请稍后再试。
文章 1–20