High-speed combined NIR low-coherence interferometry for wafer metrology HM Park, KN Joo Applied Optics 56 (31), 8592-8597, 2017 | 24 | 2017 |
Vision chromatic confocal sensor based on a geometrical phase lens HM Park, U Kwon, KN Joo Applied Optics 60 (10), 2898-2901, 2021 | 22 | 2021 |
Flexible lateral shearing interferometry based on polarization gratings for surface figure metrology HB Jeong, HM Park, YS Ghim, KN Joo Optics and Lasers in Engineering 154, 107020, 2022 | 19 | 2022 |
Dual low coherence scanning interferometry for rapid large step height and thickness measurements HM Park, HW Jung, KN Joo Optics Express 24 (25), 28625-28632, 2016 | 19 | 2016 |
Endoscopic precise 3D surface profiler based on continuously scanning structured illumination microscopy HM Park, KN Joo Current Optics and Photonics 2 (2), 172-178, 2018 | 9 | 2018 |
Radial shearing dynamic wavefront sensor based on a geometric phase lens pair HM Park, D Kim, CE Guthery, KN Joo Optics letters 47 (3), 549-552, 2022 | 8 | 2022 |
Recent progress on optical tomographic technology for measurements and inspections of film structures KN Joo, HM Park Micromachines 13 (7), 1074, 2022 | 7 | 2022 |
Shearing interferometry: Recent research trends and applications KN Joo, HM Park Current Optics and Photonics 7 (4), 325-336, 2023 | 6 | 2023 |
Spectrally resolved polarizing interferometer for single-shot line profiling HM Park, UH Kwon, YS Ghim, KN Joo Applied Optics 59 (32), 10107-10112, 2020 | 4 | 2020 |
Motionless polarizing structured illumination microscopy HM Park, KN Joo Sensors 21 (8), 2837, 2021 | 3 | 2021 |
Surface figure measurement tool based on a radial shearing interferometer using a geometric phase lens with various spherical wavefronts H Mi Park, KN Joo Applied Optics 62 (8), 1999-2006, 2023 | 2 | 2023 |
High-precision polarized dual low-coherence scanning interferometry for rapid step height measurements HM Park, SI Seo, MS Cho, KN Joo Applied Optics 62 (1), 39-45, 2022 | 2 | 2022 |
Single shot line profile measurement of multi-layered film thicknesses JS Kim, HM Park, KN Joo International Journal of Precision Engineering and Manufacturing 21, 2089-2094, 2020 | 2 | 2020 |
Note: Near infrared interferometric silicon wafer metrology MS Choi, HM Park, KN Joo Review of Scientific Instruments 87 (4), 2016 | 2 | 2016 |
Interferometric Metrology using Geometric Phases KN Joo, HM Park, HB Jeong, D Kim, CE Guthery, LD Mayer, YS Ghim Optical Fabrication and Testing, OTh2B. 4, 2023 | 1 | 2023 |
Dual low coherence scanning interferometer for rapidly measuring large step height and thickness JW Jeon, HM Park, KN Joo Conference on Lasers and Electro-Optics/Pacific Rim, W3A. 135, 2018 | 1 | 2018 |
Polarization multiplexing techniques in optical testing KN Joo, HM Park, HB Jeong, D Kim, CE Guthery, LD Mayer, YS Kim Optical Design and Testing XIV 13237, 22-25, 2024 | | 2024 |
Polarization-multiplexed snapshot lateral shearing interferometric sensor for surface roughness measurements HM Park, LD Mayer, D Kim, KN Joo Optics and Lasers in Engineering 179, 108272, 2024 | | 2024 |
Surface asymmetry measurements by single-shot cyclic azimuthal shearing interferometry KN Joo, HM Park CIRP Annals, 2024 | | 2024 |
Apparatus of vision chromatic confocal sensor based on a geometrical phase lens KN Joo, HM Park, UH Kwon, JH You US Patent App. 18/485,890, 2024 | | 2024 |