关注
Sanjana Das
Sanjana Das
Intel
在 unlv.edu 的电子邮件经过验证
标题
引用次数
引用次数
年份
Secondary electrons in EUV lithography
J Torok, R Del Re, H Herbol, S Das, I Bocharova, A Paolucci, LE Ocola, ...
Journal of Photopolymer Science and Technology 26 (5), 625-634, 2013
962013
Challenges and mitigation strategies for resist trim etch in resist-mandrel based SAQP integration scheme
N Mohanty, E Franke, E Liu, A Raley, J Smith, R Farrell, M Wang, K Ito, ...
Advanced Etch Technology for Nanopatterning IV 9428, 67-80, 2015
192015
Electron penetration depths in EUV photoresists
J Torok, B Srivats, S Memon, H Herbol, J Schad, S Das, L Ocola, ...
Journal of Photopolymer Science and Technology 27 (5), 611-615, 2014
192014
Ramachandran. Microstructure and Wear of (Al-Si Alloy) Graphite Composite
SV Das, TR Prasad
wear 133, 187-194, 1998
51998
Method for increasing pattern density on a wafer
DF Sanjana Das, Anton J. deVilliers
US Patent 10,923,363, 2021
22021
Measurement of the role of secondary electrons in EUV resist exposures
G Denbeaux, J Torok, R Del Re, H Herbol, S Das, I Bocharova, A Paolucci, ...
Proc. Int. Workshop on EUV Lithography, 2013
22013
Mitigating accumulation of aeolian dust particles on solar power generator panels without water
S Das
University of Nevada, Las Vegas, 2018
12018
The role of secondary electrons in EUV resist
G Denbeaux, J Torok, B Srivats, S Memon, H Herbol, J Schad, S Das, ...
International workshop on EUV lithography. Maui, Hawaii, 2014
12014
Ultra-High Vacuum Fabrication of Ordered Nanoparticles and Their Device Applications
B Das, GM Wilkins, S Das
Electrochemical Society Meeting Abstracts 233, 2632-2632, 2018
2018
Field Induced Ordering of Nanoparticles
GM Wilkins, S Das, B Das
Electrochemical Society Meeting Abstracts 233, 2602-2602, 2018
2018
Nanotechnology for Water-Less Cleaning of Solar Panels
S Das, S Silic, B Das
Electrochemical Society Meeting Abstracts 231, 2015-2015, 2017
2017
Analysis of Aeolian Processes and Morphological Effects in the Medusa Fossae Region of Mars
S Das, S Amara, D Aclese, D Castany, T Prejean Cole, Z Jordan, ...
43rd Annual Lunar and Planetary Science Conference, 1673, 2012
2012
Analysis of Patterns of Aeolian Processes in the Medusa Fossae Region
M Figueroa, S Amara, S Das, S Nagarajan, T Prasad
42nd Annual Lunar and Planetary Science Conference, 1249, 2011
2011
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