Secondary electrons in EUV lithography J Torok, R Del Re, H Herbol, S Das, I Bocharova, A Paolucci, LE Ocola, ... Journal of Photopolymer Science and Technology 26 (5), 625-634, 2013 | 96 | 2013 |
Challenges and mitigation strategies for resist trim etch in resist-mandrel based SAQP integration scheme N Mohanty, E Franke, E Liu, A Raley, J Smith, R Farrell, M Wang, K Ito, ... Advanced Etch Technology for Nanopatterning IV 9428, 67-80, 2015 | 19 | 2015 |
Electron penetration depths in EUV photoresists J Torok, B Srivats, S Memon, H Herbol, J Schad, S Das, L Ocola, ... Journal of Photopolymer Science and Technology 27 (5), 611-615, 2014 | 19 | 2014 |
Ramachandran. Microstructure and Wear of (Al-Si Alloy) Graphite Composite SV Das, TR Prasad wear 133, 187-194, 1998 | 5 | 1998 |
Method for increasing pattern density on a wafer DF Sanjana Das, Anton J. deVilliers US Patent 10,923,363, 2021 | 2 | 2021 |
Measurement of the role of secondary electrons in EUV resist exposures G Denbeaux, J Torok, R Del Re, H Herbol, S Das, I Bocharova, A Paolucci, ... Proc. Int. Workshop on EUV Lithography, 2013 | 2 | 2013 |
Mitigating accumulation of aeolian dust particles on solar power generator panels without water S Das University of Nevada, Las Vegas, 2018 | 1 | 2018 |
The role of secondary electrons in EUV resist G Denbeaux, J Torok, B Srivats, S Memon, H Herbol, J Schad, S Das, ... International workshop on EUV lithography. Maui, Hawaii, 2014 | 1 | 2014 |
Ultra-High Vacuum Fabrication of Ordered Nanoparticles and Their Device Applications B Das, GM Wilkins, S Das Electrochemical Society Meeting Abstracts 233, 2632-2632, 2018 | | 2018 |
Field Induced Ordering of Nanoparticles GM Wilkins, S Das, B Das Electrochemical Society Meeting Abstracts 233, 2602-2602, 2018 | | 2018 |
Nanotechnology for Water-Less Cleaning of Solar Panels† S Das, S Silic, B Das Electrochemical Society Meeting Abstracts 231, 2015-2015, 2017 | | 2017 |
Analysis of Aeolian Processes and Morphological Effects in the Medusa Fossae Region of Mars S Das, S Amara, D Aclese, D Castany, T Prejean Cole, Z Jordan, ... 43rd Annual Lunar and Planetary Science Conference, 1673, 2012 | | 2012 |
Analysis of Patterns of Aeolian Processes in the Medusa Fossae Region M Figueroa, S Amara, S Das, S Nagarajan, T Prasad 42nd Annual Lunar and Planetary Science Conference, 1249, 2011 | | 2011 |