Resonant Body Transistors in IBM's 32nm SOI CMOS technology R Marathe, W Wang, Z Mahmood, L Daniel, D Weinstein Proceedings of the 2012 IEEE International SOI Conference (SOI), 2012 | 41 | 2012 |
Resonant Body Transistors in IBM's 32nm SOI CMOS technology R Marathe, W Wang, Z Mahmood, L Daniel, D Weinstein JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 23 (3), 2014 | 40 | 2014 |
Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators W Wang Massachusetts Institute of Technology, 2011 | 26 | 2011 |
Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators W Wang 2011 Joint Conference of the IEEE International Frequency Control Symposium …, 2011 | 26 | 2011 |
Si-based unreleased hybrid MEMS-CMOS resonators in 32nm technology R Marathe, W Wang, D Weinstein 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 20 | 2012 |
An unreleased mm-wave resonant body transistor W Wang, LC Popa, R Marathe, D Weinstein 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 11 | 2011 |
Unreleased MEMS resonator and method of forming same W Wang, D Weinstein US Patent 9,041,492, 2015 | 10 | 2015 |
Acoustic bandgap structures for integration of MEMS resonators B Bichoy, R Marathe, W Wang, D Weinstein US Patent 9,232,289, 2016 | 8 | 2016 |
Deep Trench capacitor drive of a 3.3 GHz unreleased Si MEMS resonator W Wang, D Weinstein 2012 International Electron Devices Meeting, 15.1. 1-15.1. 4, 2012 | 7 | 2012 |
Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators AAS A Erbes, W Wang, D Weinstein Microsystem Technologies, 2018 | 4* | 2018 |
Solid state RF MEMS resonators in standard CMOS B Bahr, R Marathe, W Wang, D Weinstein 2013 Proceedings of the ESSCIRC (ESSCIRC), 249-252, 2013 | 4 | 2013 |
Dual trench deep trench based unreleased mems resonators W Wang, D Weinstein US Patent App. 15/285,223, 2017 | 3 | 2017 |
RF solid-state vibrating transistors W Wang, R Marathe, B Bahr, LC Popa, D Weinstein 2013 Joint European Frequency and Time Forum & International Frequency …, 2013 | 3 | 2013 |
用于恶劣环境的碳化硅微机电系统 WW X. Wang, F. Tang 科学出版社, 2010 | 2* | 2010 |
Unreleased coupled MEMS resonators and transmission filters W Wang, A Erbes, D Weinstein, AA Seshia US Patent 10,615,771, 2020 | 1 | 2020 |
Solid State MEMS Resonators in Silicon W Wang Massachusetts Institute of Technology, 2015 | 1 | 2015 |
Resonant body transistors in standard CMOS technology R Marathe, W Wang, Z Mahmood, L Daniel, D Weinstein 2012 IEEE International Ultrasonics Symposium, 289-294, 2012 | 1 | 2012 |
Thermal Stability Of Resonant Body Transistors In Standard CMOS Technology R Marathe, W Wang, Z Mahmood, L Daniel, D Weinstein | | |