Spectroscopic ellipsometry study of parylene AF4 D Solonenko, M Petschnigg, TD Dao, G Miskovic 2022 45th International Spring Seminar on Electronics Technology (ISSE), 1-5, 2022 | 3 | 2022 |
Low-Temperature Adhesive Wafer Bonding for Film Layer Transfer A Rodrigues, N Andrianov, MA Syed, M Petschnigg, T Nguyen, TD Dao, ... 2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC), 1-4, 2024 | | 2024 |
The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE M Petschnigg, N Andrianov, SM Azeem, S Trolier-McKinstry AVS 69th International Symposium and Exhibition, 2023 | | 2023 |
Actuation and Sensing for PZT Micromirrors Using Mode Directional Interdigitated Electrodes P Thakkar, A Lagosh, M Petschnigg, D Holzmann, J Pribošek 2023 IEEE SENSORS, 1-4, 2023 | | 2023 |
Impact of CH4/H2 Gas Admixture on Pb(Zr1-xTix)O3 ICP-RIE Etching Performance M Petschnigg, S Risquez, SM Azeem, A DePastina, A Lagosh, ... PESM 2023: Plasma Etch and Strip in Microtechnology (Grenoble, France), 2023 | | 2023 |
Development and characterization of PZT thin films for MEMS applications M Petschnigg Technische Universität Wien, 2021 | | 2021 |