Co-axial spectroscopic snap-shot ellipsometry for real-time thickness measurements with a small spot size SW Lee, SY Lee, G Choi, HJ Pahk Optics Express 28 (18), 25879-25893, 2020 | 25 | 2020 |
Single-shot multispectral angle-resolved ellipsometry G Choi, S Woo Lee, S Yong Lee, H Jae Pahk Applied Optics 59 (21), 6296-6303, 2020 | 15 | 2020 |
Coaxial spectroscopic imaging ellipsometry for volumetric thickness measurement SW Lee, G Choi, SY Lee, Y Cho, HJ Pahk Applied Optics 60 (1), 67-74, 2020 | 12 | 2020 |
Angle-resolved spectral reflectometry with a digital light processing projector G Choi, M Kim, J Kim, HJ Pahk Optics Express 28 (18), 26908-26921, 2020 | 11 | 2020 |
Simple method for volumetric thickness measurement using a color camera G Choi, Y Lee, SW Lee, Y Cho, HJ Pahk Applied Optics 57 (26), 7550-7558, 2018 | 7 | 2018 |
Accurate determination of two-dimensional thin film thickness in spectroscopic imaging reflectometer using color camera and tunable aperture M Kim, G Choi Optics Communications 435, 75-80, 2019 | 3 | 2019 |
Single-sequence stable spectroscopic reflectometry using simultaneous measurement of incident light and reflected light SY Lee, SW Lee, G Choi, Y Cho, HJ Pahk Applied optics 60 (28), 8915-8921, 2021 | 2 | 2021 |
Mueller matrix metrology with multi-angle information using multiple self-interference G Choi, J Kim, D Han, YU Jin, S Hwang, J Kim, W Kim, J Jung, S Lee, ... Metrology, Inspection, and Process Control XXXVII 12496, 270-277, 2023 | 1 | 2023 |
Single sequence phase shifting spectrally resolved interferometry for an in-line thin film thickness measurement using spectral reflectance and phase Y Cho, SW Lee, SY Lee, G Choi, HJ Pahk Applied Optics 60 (30), 9425-9431, 2021 | | 2021 |