| Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions S Pamidighantam, R Puers, K Baert, HAC Tilmans Journal of Micromechanics and Microengineering 12 (4), 458, 2002 | 522 | 2002 |
| Electrostatically driven vacuum-encapsulated polysilicon resonators: Part II. Theory and performance HAC Tilmans, R Legtenberg Sensors and Actuators A: physical 45 (1), 67-84, 1994 | 504 | 1994 |
| Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems HAC Tilmans Journal of Micromechanics and Microengineering 6 (1), 157, 1996 | 499 | 1996 |
| Micro resonant force gauges HAC Tilmans, M Elwenspoek, JHJ Fluitman Sensors and Actuators A: Physical 30 (1-2), 35-53, 1992 | 357 | 1992 |
| Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms R Legtenberg, HAC Tilmans, J Elders, M Elwenspoek Sensors and actuators A: Physical 43 (1-3), 230-238, 1994 | 321 | 1994 |
| MEMS for wireless communications:‘from RF-MEMS components to RF-MEMS-SiP’ HAC Tilmans, W De Raedt, E Beyne Journal of Micromechanics and Microengineering 13 (4), S139, 2003 | 305 | 2003 |
| Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication R Legtenberg, HAC Tilmans Sensors and Actuators A: Physical 45 (1), 57-66, 1994 | 257 | 1994 |
| Fine-grained polysilicon films with built-in tensile strain H Guckel, DW Burns, CCG Visser, HAC Tilmans, D Deroo IEEE Transactions on Electron Devices 35 (6), 800-801, 1988 | 220 | 1988 |
| Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems HAC Tilmans Journal of Micromechanics and Microengineering 7 (4), 285, 1997 | 216 | 1997 |
| LPCVD silicon‐rich silicon nitride films for applications in micromechanics, studied with statistical experimental design JGE Gardeniers, HAC Tilmans, CCG Visser Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (5 …, 1996 | 195 | 1996 |
| Analytical model of the DC actuation of electrostatic MEMS devices with distributed dielectric charging and nonplanar electrodes X Rottenberg, I De Wolf, BKJC Nauwelaers, W De Raedt, HAC Tilmans Journal of Microelectromechanical Systems 16 (5), 1243-1253, 2007 | 164 | 2007 |
| Investigation of the hermeticity of BCB-sealed cavities for housing (RF-) MEMS devices A Jourdain, P De Moor, S Pamidighantam, HAC Tilmans Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE …, 2002 | 151 | 2002 |
| Design considerations and technology assessment of phased-array antenna systems with RF MEMS for automotive radar applications J Schoebel, T Buck, M Reimann, M Ulm, M Schneider, A Jourdain, ... IEEE Transactions on Microwave Theory and Techniques 53 (6), 1968-1975, 2005 | 140 | 2005 |
| Static and dynamic aspects of an air-gap capacitor DJ Ijntema, HAC Tilmans Sensors and Actuators A: Physical 35 (2), 121-128, 1992 | 135 | 1992 |
| The indent reflow sealing (IRS) technique-a method for the fabrication of sealed cavities for MEMS devices HAC Tilmans, DJ Van de Peer, E Beyne Journal of microelectromechanical systems 9 (2), 206-217, 2000 | 130 | 2000 |
| Through-silicon via and die stacking technologies for microsystems-integration E Beyne, P De Moor, W Ruythooren, R Labie, A Jourdain, H Tilmans, ... 2008 IEEE International Electron Devices Meeting, 1-4, 2008 | 127 | 2008 |
| Nonlinearity and hysteresis of resonant strain gauges C Gui, R Legtenberg, HAC Tilmans, JHJ Fluitman, M Elwenspoek Journal of Microelectromechanical Systems 7 (1), 122-127, 1998 | 125 | 1998 |
| A fully-packaged electromagnetic microrelay HAC Tilmans, E Fullin, H Ziad, MDJ Van de Peer, J Kesters, E Van Geffen, ... Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE …, 1999 | 123 | 1999 |
| Resonating microbridge mass flow sensor S Bouwstra, R Legtenberg, HAC Tilmans, M Elwenspoek Sensors and Actuators A: Physical 21 (1-3), 332-335, 1990 | 118 | 1990 |
| Mechanical properties of fine grained polysilicon-the repeatability issue H Guckel, DW Burns, HAC Tilmans, DW DeRoo, CR Rutigliano IEEE technical digest on solid-state sensor and actuator workshop, 96-99, 1988 | 116 | 1988 |
