The electrical asymmetry effect in capacitively coupled radio-frequency discharges D Czarnetzki, Schulze, Schuengel Plasma Sources Science and Technology 20 (2), 024010, 2011 | 239* | 2011 |
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect Z Donkó, J Schulze, BG Heil, U Czarnetzki Journal of Physics D: Applied Physics 42 (2), 025205, 2008 | 212 | 2008 |
Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive<? format?> Radio Frequency Plasmas J Schulze, A Derzsi, K Dittmann, T Hemke, J Meichsner, Z Donkó Physical review letters 107 (27), 275001, 2011 | 197 | 2011 |
Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas T Gans, J Schulze, D O’connell, U Czarnetzki, R Faulkner, AR Ellingboe, ... Applied physics letters 89 (26), 2006 | 193 | 2006 |
The electrical asymmetry effect in capacitively coupled radio frequency discharges–measurements of dc self bias, ion energy and ion flux J Schulze, E Schüngel, U Czarnetzki Journal of Physics D: Applied Physics 42 (9), 092005, 2009 | 185 | 2009 |
Stochastic heating in asymmetric capacitively coupled RF discharges J Schulze, BG Heil, D Luggenhölscher, RP Brinkmann, U Czarnetzki Journal of Physics D: Applied Physics 41 (19), 195212, 2008 | 141 | 2008 |
Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge J Schulze, T Gans, D O'Connell, U Czarnetzki, AR Ellingboe, MM Turner Journal of Physics D: Applied Physics 40 (22), 7008, 2007 | 141 | 2007 |
Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges J Schulze, E Schüngel, Z Donkó, D Luggenhölscher, U Czarnetzki Journal of Physics D: Applied Physics 43 (12), 124016, 2010 | 135 | 2010 |
Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures J Schulze, Z Donkó, BG Heil, D Luggenhölscher, T Mussenbrock, ... Journal of Physics D: Applied Physics 41 (10), 105214, 2008 | 132 | 2008 |
The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges J Schulze, E Schüngel, Z Donkó, U Czarnetzki Plasma Sources Science and Technology 20 (1), 015017, 2011 | 123 | 2011 |
Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments Z Donkó, J Schulze, U Czarnetzki, A Derzsi, P Hartmann, I Korolov, ... Plasma Physics and Controlled Fusion 54 (12), 124003, 2012 | 112 | 2012 |
Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges Z Donkó, J Schulze, U Czarnetzki, D Luggenhölscher Applied Physics Letters 94 (13), 2009 | 112 | 2009 |
Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures J Schulze, BG Heil, D Luggenhölscher, T Mussenbrock, RP Brinkmann, ... Journal of Physics D: Applied Physics 41 (4), 042003, 2008 | 110 | 2008 |
Secondary electrons in dual-frequency capacitive radio frequency discharges J Schulze, Z Donkó, E Schüngel, U Czarnetzki Plasma Sources Science and Technology 20 (4), 045007, 2011 | 109 | 2011 |
The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges Z Donkó, J Schulze, P Hartmann, I Korolov, U Czarnetzki, E Schüngel Applied Physics Letters 97 (8), 2010 | 106 | 2010 |
Electron dynamics in low pressure capacitively coupled radio frequency discharges S Wilczek, J Schulze, RP Brinkmann, Z Donkó, J Trieschmann, ... Journal of Applied Physics 127 (18), 2020 | 99 | 2020 |
Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model J Schulze, E Schüngel, U Czarnetzki, Z Donkó Journal of Applied Physics 106 (6), 2009 | 95 | 2009 |
The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges S Wilczek, J Trieschmann, J Schulze, E Schuengel, RP Brinkmann, ... Plasma Sources Science and Technology 24 (2), 024002, 2015 | 94 | 2015 |
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas A Derzsi, I Korolov, E Schüngel, Z Donkó, J Schulze Plasma Sources Science and Technology 24 (3), 034002, 2015 | 85 | 2015 |
Numerical modeling of electron beams accelerated by the radio frequency boundary sheath BG Heil, J Schulze, T Mussenbrock, RP Brinkmann, U Czarnetzki IEEE transactions on plasma science 36 (4), 1404-1405, 2008 | 85 | 2008 |