Vapor phase processing: a novel approach for fabricating functional hybrid materials K Ashurbekova, K Ashurbekova, G Botta, O Yurkevich, M Knez Nanotechnology 31 (34), 342001, 2020 | 44 | 2020 |
Ultrathin hybrid SiAlCOH dielectric films through ring-opening molecular layer deposition of cyclic tetrasiloxane K Ashurbekova, K Ashurbekova, I Saric, M Gobbi, E Modin, A Chuvilin, ... Chemistry of materials 33 (3), 1022-1030, 2021 | 28 | 2021 |
Atomic layer deposition of aluminum nitride and oxynitride on silicon using tris (dimethylamido) aluminum, ammonia, and water AI Abdulagatov, RR Amashaev, KN Ashurbekova, KN Ashurbekova, ... Russian Journal of General Chemistry 88, 1699-1706, 2018 | 23 | 2018 |
Molecular layer deposition and thermal transformations of titanium (aluminum)-vanadium hybrid organic-inorganic films AI Abdulagatov, KN Ashurbekova, KN Ashurbekova, RR Amashaev, ... Russian Journal of Applied Chemistry 91, 347-359, 2018 | 15 | 2018 |
Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V 3 D 3) and azasilane K Ashurbekova, K Ashurbekova, I Saric, E Modin, M Petravić, ... Chemical communications 56 (62), 8778-8781, 2020 | 14 | 2020 |
Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films K Ashurbekova, K Ashurbekova, I Saric, E Modin, M Petravic, ... Chemical communications 57 (17), 2160-2163, 2021 | 13 | 2021 |
Atomic Layer Deposition of Y2O3 Using Tris(butylcyclopentadienyl)yttrium and Water AI Abdulagatov, RR Amashaev, KN Ashurbekova, SM Ramazanov, ... Russian Microelectronics 48, 1-12, 2019 | 9 | 2019 |
Biocompatible Silicon-Based Hybrid Nanolayers for Functionalization of Complex Surface Morphologies K Ashurbekova, K Ashurbekova, B Alonso-Lerma, I Šarić, L Barandiaran, ... ACS applied nano materials 5 (2), 2762-2768, 2022 | 8 | 2022 |
In Situ Investigation of Thermally Induced Surface Graphenization of Polymer-Derived Ceramic (PDC) Coatings from Molecular Layer (MLD) Deposited Silicon … K Ashurbekova, E Modin, H Hano, K Ashurbekova, I Saric Jankovic, ... Chemistry of Materials 35 (19), 8092-8100, 2023 | 2 | 2023 |
Synthesis and antibacterial properties of modified thin films of TiO2 AI Abdulagatov, RR Amashaev, AM Maksumova, KN Ashurbekova, ... Ecological Medicine 2 (1), 91-100, 2019 | 2 | 2019 |
Atomic Layer Processing (ALP): Ubi es et Quo Vadis? K Ashurbekova, M Knez Advanced Materials Interfaces, 2400408, 2024 | | 2024 |
Antibacterial biomimetic metallochitin thin films grown by molecular layer deposition K Ashurbekova, K Ashurbekova, A Muriqi, L Barandiaran, ... Bioinspiration, Biomimetics, and Bioreplication XII, 2022 | | 2022 |