| Sub-10 nm patterning using EUV interference lithography B Päivänranta, A Langner, E Kirk, C David, Y Ekinci Nanotechnology 22 (37), 375302, 2011 | 215 | 2011 |
| A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating Y Wang, S Park, JTW Yeow, A Langner, F Müller Sensors and Actuators B: Chemical 149 (1), 136-142, 2010 | 140 | 2010 |
| Nondestructive replication of self-ordered nanoporous alumina membranes via cross-linked polyacrylate nanofiber arrays S Grimm, R Giesa, K Sklarek, A Langner, U Gösele, HW Schmidt, ... Nano letters 8 (7), 1954-1959, 2008 | 93 | 2008 |
| Generation of extreme ultraviolet vortex beams using computer generated holograms B Terhalle, A Langner, B Päivänranta, VA Guzenko, C David, Y Ekinci Optics letters 36 (21), 4143-4145, 2011 | 60 | 2011 |
| Fabrication of quasiperiodic nanostructures with EUV interference lithography A Langner, B Päivänranta, B Terhalle, Y Ekinci Nanotechnology 23 (10), 105303, 2012 | 36 | 2012 |
| TiO2 microstructures by inversion of macroporous silicon using atomic layer deposition A Langner, M Knez, F Müller, U Gösele Applied Physics A 93, 399-403, 2008 | 22 | 2008 |
| Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers A Rissanen, A Langner, KH Viherkanto, R Mannila MOEMS and Miniaturized Systems XIV 9375, 120-127, 2015 | 20 | 2015 |
| Advanced holographic methods in extreme ultraviolet interference lithography B Terhalle, A Langner, B Päivänranta, Y Ekinci Nanoengineering: Fabrication, Properties, Optics, and Devices VIII 8102, 132-138, 2011 | 20 | 2011 |
| Measuring resist-induced contrast loss using EUV interference lithography A Langner, HH Solak, R Gronheid, E van Setten, V Auzelyte, Y Ekinci, ... Extreme Ultraviolet (EUV) Lithography 7636, 878-888, 2010 | 17 | 2010 |
| Thermal development of a calixarene resist V Auzelyte, A Langner, HH Solak Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 16 | 2009 |
| Formation of straight 10 nm diameter silicon nanopores in gold decorated silicon CC Buttner, A Langner, M Geuss, F Muller, P Werner, U Gosele ACS nano 3 (10), 3122-3126, 2009 | 15 | 2009 |
| Macroporous silicon A Langner, F Müller, U Gösele Molecular-and nano-tubes, 431-460, 2011 | 14 | 2011 |
| Fabrication and characterization of macroporous silicon A Langner | 6 | 2008 |
| Applications of the high resolution optical reconstruction of digital holograms G Wernicke, J Frank, H Gruber, M Dürr, A Langner, S Eisebitt, C Günther, ... Practical Holography XX: Materials and Applications 6136, 228-235, 2006 | 4 | 2006 |
| Herstellung von Nanostrukturen mittels Atomlagenabscheidung A Langner, M Knez, U Gösele Chemie Ingenieur Technik 80 (11), 1719-1724, 2008 | 1 | 2008 |
| Nanostructure creation by atom layer truncation A Langner, M Knez, U Gosele Chemie Ingenieur Technik 80 (11), 1719-1724, 2008 | | 2008 |
| Characterization of photonic crystals via negative refraction A Langner, F Müller | | |
