A low impedance CMOS-MEMS capacitive resonator based on metal-insulator-metal (MIM) capacitor structure HY Chen, SS Li, MH Li IEEE Electron Device Letters 42 (7), 1045-1048, 2021 | 16 | 2021 |
Platform development for CMOS-MEMS multi-gap capacitive transducers HY Chen, PI Shih, WR Ali, MH Li, SS Li Journal of Microelectromechanical Systems, 2023 | 5 | 2023 |
5V-Bias Cmos-Mems Capacitive Resonator with RM< 5KΩ Based On Metal-Insulator-Metal (Mim) Capacitor HY Chen, PI Shih, MH Li, SS Li 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 5 | 2022 |
Development of rolling bearing health diagnosis and prediction system using MEMS accelerometer vibration sensing module J Satija, PW Huang, S Singh, T Shen, HY Chen, SS Li 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 3 | 2022 |
A new finding on nonlinear damping and stiffness of flexural mode capacitive mems resonators HY Chen, MH Li, SS Li 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 2 | 2023 |
A Single-Chip CMOS-MEMS CMUT Array Transceiver With Low Bias HY Chen, YS Chan, TH Hsu, MH Li, SS Li 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | 1 | 2023 |
A Bipolar-Biased Differential CMOS-MEMS CMUT PC Chen, YC Lin, HY Chen, SS Li, MH Li 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | | 2024 |
An Intrinsically Temperature-Compensated Fully Differential CMOS-MEMS Resonator with Dual-Resistor Piezoresistive Detection ZQ Lee, JS Jiang, HY Chen, SS Li, MH Li 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | | 2023 |