BEOL embedded RF-MEMS switch for mm-wave applications M Kaynak, KE Ehwald, J Drews, R Scholz, F Korndörfer, D Knoll, B Tillack, ... 2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009 | 65 | 2009 |
Silicon cylinder spiral coil for nuclear magnetic resonance spectroscopy of nanoliter samples S Leidich, M Braun, T Gessner, T Riemer Concepts in Magnetic Resonance Part B: Magnetic Resonance Engineering: An …, 2009 | 23 | 2009 |
Micro arc welding for electrode gap reduction of high aspect ratio microstructures M Nowack, S Leidich, D Reuter, S Kurth, M Küchler, A Bertz, T Geßner Sensors and Actuators A: Physical 188, 495-502, 2012 | 21 | 2012 |
Method for detecting anomalies in a battery cell, and short-circuit sensor system S Leidich, S Schumann, F Henrici US Patent 10,073,143, 2018 | 13 | 2018 |
Rotation angle sensor system, lidar system, work device and operating method for a LIDAR system F Utermoehlen, S Leidich US Patent 11,112,492, 2021 | 12 | 2021 |
A fast and low actuation voltage MEMS switch for mm-wave and its integration A Akiba, S Mitarai, S Morita, K Ikeda, S Kurth, S Leidich, A Bertz, ... 2010 International Electron Devices Meeting, 36.4. 1-36.4. 4, 2010 | 10 | 2010 |
Continuously tunable RF-MEMS varactor for high power applications S Leidich, S Kurth, T Gessner 2008 IEEE MTT-S International Microwave Symposium Digest, 1267-1270, 2008 | 9 | 2008 |
Reliability enhancement of Ohmic RF MEMS switches S Kurth, S Leidich, A Bertz, M Nowack, J Frömel, C Kaufmann, W Faust, ... Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and …, 2011 | 7 | 2011 |
Sensor Arrangement for Sensing Rotation Angles on a Rotating Component in a Vehicle R Has, S Leidich, M Kienzle US Patent App. 14/705,312, 2015 | 6 | 2015 |
Method and device for determining a sensor coil inductance T Buck, A Merz, S Leidich US Patent 11,143,681, 2021 | 5 | 2021 |
Sensor arrangement for the contactless sensing of angles of rotation on a rotating part S Leidich, J Oberlaender, O Krayl US Patent 10,458,815, 2019 | 5 | 2019 |
Sensor arrangement for the contactless sensing of angles of rotation on a rotating part S Leidich, R Ameling US Patent 10,330,498, 2019 | 5 | 2019 |
Rotation angle sensor system, lidar system, work device and operating method for a lidar system F Utermoehlen, S Leidich US Patent App. 16/021,241, 2019 | 5 | 2019 |
24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk Technology S Voigt, S Leidich, W Doetzel, S Kurth, T Gessner Journal of Physics: Conference Series 34 (1), 228, 2006 | 5 | 2006 |
Coil assembly and corresponding measuring assembly T Buck, A Merz, O Krayl, S Leidich US Patent 11,268,832, 2022 | 3 | 2022 |
Sensor system for determining at least one rotational characteristic of an element rotating about at least one axis of rotation A Yashan, D Oshinubi, F Utermoehlen, S Leidich US Patent App. 16/469,220, 2020 | 3 | 2020 |
Sensor device for ascertaining at least one rotation characteristic of a rotating element D Oshinubi, S Leidich US Patent 9,958,297, 2018 | 3 | 2018 |
Low temperature wafer bonding technologies M Haubold, M Baum, I Schubert, S Leidich, M Wiemer, T Gessner 18th European Microelectronics & Packaging Conference, 1-8, 2011 | 3 | 2011 |
Compact meta-material transmission line balun based on meander lines structure and MEMS technology C Huang, D Chen, S Leidich, T Gessner Microelectronic engineering 87 (4), 584-587, 2010 | 3 | 2010 |
Linear travel measurement apparatus and measurement method for a compression travel of an electrically conductive spring and also a corresponding spring unit F Utermoehlen, S Leidich US Patent 10,036,655, 2018 | 2 | 2018 |