| Elastic modulus and coefficient of thermal expansion of piezoelectric Al1− xScxN (up to x= 0.41) thin films Y Lu, M Reusch, N Kurz, A Ding, T Christoph, M Prescher, L Kirste, ... Apl Materials 6 (7), 2018 | 105 | 2018 |
| Doped layer optimization for silicon heterojunctions by injection-level-dependent open-circuit voltage measurements M Bivour, M Reusch, S Schröer, F Feldmann, J Temmler, H Steinkemper, ... IEEE Journal of Photovoltaics 4 (2), 566-574, 2014 | 85 | 2014 |
| Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films Y Lu, M Reusch, N Kurz, A Ding, T Christoph, L Kirste, V Lebedev, ... physica status solidi (a) 215 (9), 1700559, 2018 | 78 | 2018 |
| Fill factor limitation of silicon heterojunction solar cells by junction recombination M Reusch, M Bivour, M Hermle, SW Glunz Energy Procedia 38, 297-304, 2013 | 53 | 2013 |
| Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices M Reusch, S Cherneva, Y Lu, A Žukauskaitė, L Kirste, K Holc, M Datcheva, ... Applied Surface Science 407, 307-314, 2017 | 47 | 2017 |
| Temperature dependence of the pyroelectric coefficient of AlScN thin films N Kurz, Y Lu, L Kirste, M Reusch, A Žukauskaitė, V Lebedev, O Ambacher physica status solidi (a) 215 (13), 1700831, 2018 | 35 | 2018 |
| Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices M Reusch, K Holc, W Pletschen, L Kirste, A Žukauskaitė, T Yoshikawa, ... Journal of Vacuum Science & Technology B 34 (5), 2016 | 32 | 2016 |
| Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films C Reichel, M Reusch, F Granek, M Hermle, SW Glunz 2010 35th IEEE Photovoltaic Specialists Conference, 001034-001038, 2010 | 26 | 2010 |
| Requirements for carrier selective silicon heterojunctions M Bivour, M Reusch, F Feldmann, M Hermle, S Glunz Proc. 24th Workshop on Crys. Silicon Sol. Cells Mod. Mat. Proc, 2014 | 21 | 2014 |
| Piezoelectric characterization of Sc0. 26Al0. 74N layers on Si (001) substrates MS Lozano, A Pérez-Campos, M Reusch, L Kirste, T Fuchs, ... Materials Research Express 5 (3), 036407, 2018 | 17 | 2018 |
| Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators A Ding, M Reusch, Y Lu, N Kurz, R Lozar, T Christoph, R Driad, ... 2018 IEEE International Ultrasonics Symposium (IUS), 1-9, 2018 | 13 | 2018 |
| Insulating and passivating plasma-enhanced atomic layer deposited aluminum oxide thin films for silicon solar cells C Reichel, M Reusch, S Kotula, F Granek, A Richter, M Hermle, SW Glunz Thin Solid Films 656, 53-60, 2018 | 12 | 2018 |
| Electrostatic self-assembly of diamond nanoparticles onto Al-and N-polar sputtered aluminum nitride surfaces T Yoshikawa, M Reusch, V Zuerbig, V Cimalla, KH Lee, M Kurzyp, ... Nanomaterials 6 (11), 217, 2016 | 12 | 2016 |
| Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers T Yoshikawa, M Reusch, K Holc, D Iankov, V Zuerbig, A Zukauskaite, ... Applied Physics Letters 108 (17), 2016 | 11 | 2016 |
| Temperature cross-sensitivity of AlN-based flexural plate wave sensors M Reusch, K Holc, V Lebedev, N Kurz, A Žukauskaitė, O Ambacher IEEE Sensors Journal 18 (19), 7810-7818, 2018 | 9 | 2018 |
| Flexural plate wave sensors with buried IDT for sensing in liquids M Reusch, K Holc, A Žukauskaitė, V Lebedev, N Kurz, O Ambacher 2017 IEEE SENSORS, 1-3, 2017 | 7 | 2017 |
| Piezoelectric AlN films for FPW sensors with improved device performance M Reusch, K Holc, L Kirste, P Katus, L Reindl, O Ambacher, V Lebedev Procedia Engineering 168, 1040-1043, 2016 | 7 | 2016 |
| Phys. Status Solidi C Y Lu, M Reusch, N Kurz, A Ding, T Christoph, L Kirste, V Lebedev, ... Phys. Status Solidi C 10 (11), 1397-1400, 2013 | 7 | 2013 |
| Nanodiamond resonators fabricated on 8 ″Si substrates using adhesive wafer bonding V Lebedev, T Lisec, T Yoshikawa, M Reusch, D Iankov, C Giese, ... Journal of Micromechanics and Microengineering 27 (6), 065011, 2017 | 4 | 2017 |
| Tunable multisegment SixNy/AlN piezo lenses for wavefront correction V Zuerbig, D Pätz, J Fries, M Bichra, W Pletschen, K Holc, M Reusch, ... 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 4 | 2015 |
Oliver AmbacherGips-Schüle-Professur für Leistungselektronik, Universität Freiburg在 inatech.uni-freiburg.de 的电子邮件经过验证
