关注
Sung Hyun Son
Sung Hyun Son
其他姓名Sunghyun Son, 손 성현
Ph.D. student, Princeton University
在 princeton.edu 的电子邮件经过验证
标题
引用次数
引用次数
年份
Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry
SH Son, G Go, W Villafana, ID Kaganovich, A Khrabrov, HC Lee, ...
Applied Physics Letters 123 (23), 2023
52023
Investigation of ion collision effect on electrostatic sheath formation in weakly ionized and weakly collisional plasma
H Lee, NK Kim, MG Lee, JW Kwon, SH Son, N Bae, T Park, S Park, ...
Plasma Sources Science and Technology 31 (8), 084006, 2022
52022
In-Situ Diagnostic of Channel Erosion in Hall Thrusters
I Romadanov, I Mishra, J Kiviat, SH Son, B Benjadol, A Ottaviano, ...
AIAA SCITECH 2024 Forum, 0691, 2024
12024
Kinetic simulation of narrow gap discharge
JY Kim, SH Son, G Go, KJ Chung, I Kaganovich
APS Annual Gaseous Electronics Meeting Abstracts, FM2. 007, 2022
12022
Measurements of two-dimensional ion velocity distributions in electron beam generated E x B plasma
S Son, I Romadanov, N Chopra, Y Raitses
Bulletin of the American Physical Society, 2024
2024
Mechanism of unintended breakdowns in advanced plasma sources in the semiconductor Industry
W Villafana, I Kaganovich, S Son
Bulletin of the American Physical Society, 2024
2024
Reconstruction of magnetic island electron temperature in mixed second and third harmonic electron cyclotron emission conditions
E Jung, L Bardóczi, ME Austin, SH Son, AH Reiman
Review of Scientific Instruments 95 (6), 2024
2024
2D Kinetic Simulation of Partially Magnetized Capacitively Coupled Plasma Sources
SH Son, J Park, KJ Chung
Journal of the Semiconductor & Display Technology 22 (1), 118-123, 2023
2023
Etch Profile Analysis on Taper angle using Convolution Neural Network in Narrow Gap VHF+ LF driven CCP
J Park, J Song, T Park, SH Son, H Lee, GH Kim
APS Annual Gaseous Electronics Meeting Abstracts, HW6. 070, 2022
2022
Analysis of Si Etch Uniformity of Very High Frequency Driven-Capacitively Coupled Ar/SF6 Plasmas
S Lim, I Lee, H Lee, SH Son, GH Kim
Journal of the Semiconductor & Display Technology 20 (4), 72-77, 2021
2021
Influence of Wall Conditioning State on AR Plasma Emission in a Processing Chamber
J Song, J Kim, DC Kim, MY Song, JS Yoon, SH Son, JW Kwon, S Ryu, ...
2020 IEEE International Conference on Plasma Science (ICOPS), 95-95, 2020
2020
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