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| 3D Integration Technology for Quantum Computer based on Diamond Spin Qubits R Ishihara, J Hermias, S Yu, KY Yu, Y Li, S Nur, T Iwai, T Miyatake, ... 2021 IEEE International Electron Devices Meeting (IEDM), 14.5. 1-14.5. 4, 2021 | 6 | 2021 |
