Extreme-ultraviolet light source for lithography based on an expanding jet of dense xenon plasma supported by microwaves IS Abramov, ED Gospodchikov, AG Shalashov Physical Review Applied 10 (3), 034065, 2018 | 61 | 2018 |
Observation of extreme ultraviolet light emission from an expanding plasma jet with multiply charged argon or xenon ions AG Shalashov, AV Vodopyanov, IS Abramov, AV Sidorov, ... Applied Physics Letters 113 (15), 2018 | 42 | 2018 |
Prospects of extreme ultraviolet radiation sources based on microwave discharge for high-resolution lithography IS Abramov, ED Gospodchikov, AG Shalashov Physics of Plasmas 24 (7), 2017 | 16 | 2017 |
Theory of a stationary microwave discharge with multiply charged ions in an expanding gas jet AG Shalashov, IS Abramov, SV Golubev, ED Gospodchikov Journal of Experimental and Theoretical Physics 123, 219-230, 2016 | 12 | 2016 |
Effect of ion acceleration on a plasma potential profile formed in the expander of a mirror trap IS Abramov, ED Gospodchikov, RA Shaposhnikov, AG Shalashov Nuclear Fusion 59 (10), 106004, 2019 | 11 | 2019 |
Formation of a multi-charged plasma in the directed gas flow IS Abramov, ED Gospodchikov, AG Shalashov Radiophysics and Quantum Electronics 58, 914-933, 2016 | 8 | 2016 |
Formation of UV-radiating strongly non-equilibrium plasma with multiply charged ions in the expanding high-pressure gas jet AG Shalashov, SV Golubev, IS Abramov, ED Gospodchikov AIP Conference Proceedings 1771 (1), 2016 | 7 | 2016 |
Extreme ultraviolet radiation source based on a discharge sustained by a radiation pulse from a terahertz free-electron laser IS Abramov, ED Gospodchikov, AG Shalashov Journal of Experimental and Theoretical Physics 132, 223-232, 2021 | 5 | 2021 |
Expansion of laser discharge in xenon jet improves EUV-light emission IS Abramov, SV Golubev, ED Gospodchikov, AG Shalashov Applied Physics Letters 123 (19), 2023 | 4 | 2023 |
Nonlinear Interaction of Microwave Radiation with a Plasma Flow under Hybrid Resonance Conditions IS Abramov, ED Gospodchikov, AG Shalashov Journal of Experimental and Theoretical Physics 129, 444-454, 2019 | 4 | 2019 |
Frequency sweeping events in cyclotron emission of energetic electrons in ECR discharge plasmas ME Viktorov, AG Shalashov, ED Gospodchikov, DA Mansfeld, IS Abramov, ... 45th EPS Conference on Plasma Physics, EPS 2018, 101-104, 2018 | 1 | 2018 |
On Stationary Flow of Dense Plasma under Localized Energy Deposition IS Abramov, ED Gospodchikov, AG Shalashov Plasma Physics Reports 49 (2), 209-218, 2023 | | 2023 |
Ion acceleration in a non-equilibrium plasma flow expanding from a magnetic mirror IS Abramov, RA Shaposhnikov, ED Gospodchikov, AG Shalashov 46th EPS Conference on Plasma Physics, EPS 2019, 2019 | | 2019 |
Modelling of EUV light sources based on microwave discharge in inhomogeneous flow of nonequilibrium plasma with multiply charged tin and xenon ions IS Abramov, ED Gospodchikov, AG Shalashov EPJ Web of Conferences 187, 01001, 2018 | | 2018 |
Gas-Flow Perturbation by a High-Power Heat Source IS Abramov, VE Semenov Radiophysics and Quantum Electronics 60, 661-669, 2018 | | 2018 |
Source of extreme ultraviolet light based on expanding jet of dense plasma supported by microwaves: theory and modelling IS Abramov, AG Shalashov, ED Gospodchikov, AV Sidorov, ... 45th EPS Conference on Plasma Physics, EPS 2018, 937-940, 2018 | | 2018 |
Power heat source in gas flow: possible regimes and mechanisms of their attainment IS Abramov, VE Semenov XLIV International Zvenigorod conference on plasma physics and controlled …, 2017 | | 2017 |
Theory of resonant stationary discharge with multiply charged ions in plasma flow propagating in mirror magnetic trap IS Abramov, ED Gospodchikov, AG Shalashov EPJ Web of Conferences 149, 02024, 2017 | | 2017 |
Microwave discharge with multiply charged ions in expanding gas jet as a point source of UV radiation AG Shalashov, SV Golubev, ED Gospodchikov, IS Abramov 43rd European Physical Society Conference on Plasma Physics, EPS 2016, 2016 | | 2016 |
On multi-charge ion plasma formation in directed gas flow IS Abramov, ED Gospodchikov, AG Shalashov XLII International Zvenigorod conference on plasma physics and controlled …, 2015 | | 2015 |