Plasma propulsion of a metallic microdroplet and its deformation upon laser impact D Kurilovich, AL Klein, F Torretti, A Lassise, R Hoekstra, W Ubachs, ... Physical review applied 6 (1), 014018, 2016 | 105 | 2016 |
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography F Torretti, J Sheil, R Schupp, MM Basko, M Bayraktar, RA Meijer, S Witte, ... Nature communications 11 (1), 2334, 2020 | 93 | 2020 |
Efficient Generation of Extreme Ultraviolet Light From :YAG-Driven Microdroplet-Tin Plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Scheers, D Kurilovich, ... Physical Review Applied 12 (1), 014010, 2019 | 63 | 2019 |
Power-law scaling of plasma pressure on laser-ablated tin microdroplets D Kurilovich, MM Basko, DA Kim, F Torretti, R Schupp, JC Visschers, ... Physics of Plasmas 25 (1), 2018 | 55 | 2018 |
Analysis of the fine structure of ions by optical spectroscopy in an electron-beam ion trap A Windberger, F Torretti, A Borschevsky, A Ryabtsev, S Dobrodey, ... Physical Review A 94 (1), 012506, 2016 | 55 | 2016 |
Optical spectroscopy of complex open--shell ions F Torretti, A Windberger, A Ryabtsev, S Dobrodey, H Bekker, W Ubachs, ... Physical Review A 95 (4), 042503, 2017 | 46 | 2017 |
Expansion dynamics after laser-induced cavitation in liquid tin microdroplets D Kurilovich, TF Pinto, F Torretti, R Schupp, J Scheers, AS Stodolna, ... Physical Review Applied 10 (5), 054005, 2018 | 42 | 2018 |
Short-wavelength out-of-band EUV emission from Sn laser-produced plasma F Torretti, R Schupp, D Kurilovich, A Bayerle, J Scheers, W Ubachs, ... Journal of Physics B: Atomic, Molecular and Optical Physics 51 (4), 045005, 2018 | 38 | 2018 |
EUV spectroscopy of highly charged ions in an electron-beam ion trap J Scheers, C Shah, A Ryabtsev, H Bekker, F Torretti, J Sheil, DA Czapski, ... Physical Review A 101 (6), 062511, 2020 | 31 | 2020 |
Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Sheil, J Scheers, ... Applied Physics Letters 115 (12), 2019 | 30 | 2019 |
Spectral characterization of an industrial EUV light source for nanolithography F Torretti, F Liu, M Bayraktar, J Scheers, Z Bouza, W Ubachs, R Hoekstra, ... Journal of physics D: applied physics 53 (5), 055204, 2019 | 24 | 2019 |
Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light SA Reijers, D Kurilovich, F Torretti, H Gelderblom, OO Versolato Journal of Applied Physics 124 (1), 2018 | 20 | 2018 |
Energy-level structure of ions J Scheers, A Ryabtsev, A Borschevsky, JC Berengut, K Haris, R Schupp, ... Physical Review A 98 (6), 062503, 2018 | 16 | 2018 |
Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy-and charge-state-resolved spectrometry of tin laser-produced plasma L Poirier, A Bayerle, A Lassise, F Torretti, R Schupp, L Behnke, Y Mostafa, ... Applied Physics B 128 (3), 39, 2022 | 9 | 2022 |
Lithography machine in-line broadband spectrum metrology F Liu, F van de Wetering, M Bayraktar, F Bijkerk, D Smeets, S Huang, Y Ni, ... P43), EUVL Workshop, 2019 | 3 | 2019 |
Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography O Versolato, A Bayerle, M Bayraktar, L Behnke, H Bekker, Z Bouza, ... Journal of Physics: Conference Series 1412 (19), 192006, 2020 | | 2020 |
Spectroscopic measurements of Sn Laser-Produced Plasmas L Behnke, R Schupp, Z Bouza, J Scheers, J Sheil, F Torretti, M Bayraktar, ... EUV Source Workshop 2019, 2019 | | 2019 |
Spectral investigation of Sn laser-produced plasmas in the extreme ultraviolet range Z Bouza, J Scheers, J Sheil, R Schupp, F Torretti, M Bayraktar, F Bijkerk, ... 43rd Annual Meeting NNV AMO 2019, 2019 | | 2019 |
Emission of tin plasmas for lithography applications J Colgan, A Neukirch, D Kilcrease, J Abdallah, M Sherrill, C Fontes, ... APS Division of Atomic, Molecular and Optical Physics Meeting Abstracts 2019 …, 2019 | | 2019 |
Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography F Torretti | | 2019 |