X-cut lithium niobate laterally vibrating MEMS resonator with figure of merit of 1560 L Colombo, A Kochhar, G Vidal-Alvarez, G Piazza Journal of Microelectromechanical Systems 27 (4), 602-604, 2018 | 59 | 2018 |
Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient FV Pop, AS Kochhar, G Vidal-Alvarez, G Piazza 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 52 | 2017 |
High-figure-of-merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications L Colombo, A Kochhar, G Vidal-Alvarez, G Piazza IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 67 …, 2020 | 49 | 2020 |
Resonant microelectromechanical receiver A Kochhar, ME Galanko, M Soliman, H Abdelsalam, L Colombo, YC Lin, ... Journal of Microelectromechanical Systems 28 (3), 327-343, 2019 | 37 | 2019 |
Investigation of electromechanical coupling and quality factor of X-cut lithium niobate laterally vibrating resonators operating around 400 MHz FV Pop, AS Kochhar, G Vidal-Álvarez, G Piazza Journal of Microelectromechanical Systems 27 (3), 407-413, 2018 | 32 | 2018 |
Delay lines based on a suspended thin film of X-cut lithium niobate G Vidal-Álvarez, A Kochhar, G Piazza 2017 IEEE International Ultrasonics Symposium (IUS), 1-4, 2017 | 30 | 2017 |
Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution G Vidal-Álvarez, J Agustí, F Torres, G Abadal, N Barniol, J Llobet, ... Nanotechnology 26 (14), 145502, 2015 | 27 | 2015 |
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators L Colombo, A Kochhar, G Vidal-Álvarez, P Simeoni, U Soysal, G Piazza Journal of Microelectromechanical Systems 31 (6), 888-900, 2022 | 20 | 2022 |
Suppression of the Af-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles G Sobreviela, G Vidal-Alvarez, M Riverola, A Uranga, F Torres, N Barniol Sensors and actuators A: physical 256, 59-65, 2017 | 20 | 2017 |
An 18 nW− 47/− 40 dBm sensitivity 3/100 kbps MEMS-assisted CMOS wake-up receiver M Soliman, A Kochhar, H Abdelsalam, FV Pop, G Vidal-Álvarez, J Weldon, ... IEEE Transactions on Circuits and Systems I: Regular Papers 66 (11), 4439-4447, 2019 | 19 | 2019 |
Dynamic properties of three-terminal tungsten CMOS-NEM relays under nonlinear tapping mode M Riverola, G Vidal-Alvarez, G Sobreviela, A Uranga, F Torres, N Barniol IEEE Sensors Journal 16 (13), 5283-5291, 2016 | 18 | 2016 |
CMOS-MEMS switches based on back-end metal layers JL Muñoz-Gamarra, G Vidal-Alvarez, F Torres, A Uranga, N Barniol Microelectronic Engineering 119, 127-130, 2014 | 18 | 2014 |
Ultra-low-power and high sensitivity resonant micromechanical receiver L Colombo, MB Galanko, H Abdelsalam, A Kochhar, G Vidal-Alvarez, ... 2017 IEEE SENSORS, 1-3, 2017 | 15 | 2017 |
Fabrication and measurement of a suspended nanochannel microbridge resonator monolithically integrated with CMOS readout circuitry G Vidal-Álvarez, E Marigó, F Torres, N Barniol Micromachines 7 (3), 40, 2016 | 13 | 2016 |
Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators A Kochhar, L Colombo, G Vidal-Alvarez, G Piazza 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 12 | 2017 |
CMOS-NEM relay based on tungsten VIA layer M Riverola, G Vidal-Álvarez, F Torres, N Barniol SENSORS, 2014 IEEE, 162-165, 2014 | 12 | 2014 |
Comparison between different MEMS laterally vibrating resonator technologies for passive voltage amplification in an RF front-end system L Colombo, A Kochhar, G Vidal-Álvarez, Z Schaffer, P Simeoni, G Piazza 2018 IEEE MTT-S International Microwave Workshop Series on Advanced …, 2018 | 11 | 2018 |
3-terminal tungsten CMOS-NEM relay M Riverola, G Vidal-Álvarez, F Torres, N Barniol 2014 10th Conference on Ph. D. Research in Microelectronics and Electronics …, 2014 | 11 | 2014 |
Investigations on the quality factor of lithium niobate laterally vibrating resonators with figure of merit greater than 1,500 L Colombo, A Kochhar, G Vidal-Álvarez, G Piazza 2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018 | 10 | 2018 |
Top electrode shaping for harnessing high coupling in thickness shear mode resonators in Y-cut lithium niobate thin films A Kochhar, G Vidal-Alvarez, L Colombo, G Piazza 2018 IEEE Micro Electro Mechanical Systems (MEMS), 71-74, 2018 | 9 | 2018 |