| Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow R Gronheid, PR Delgadillo, H Pathangi, D Van den Heuvel, D Parnell, ... Alternative Lithographic Technologies VI 9049, 15-24, 2014 | 57 | 2014 |
| Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow H Pathangi, BT Chan, H Bayana, N Vandenbroeck, DVD Heuvel, LV Look, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031204-031204, 2015 | 35 | 2015 |
| Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals N Gutman, E Amit, S Eyring, H Pathangi, F Laske, U Pohlmann, T Heidrich US Patent 10,473,460, 2019 | 22 | 2019 |
| Self-detecting gate-tunable nanotube paddle resonators B Witkamp, M Poot, H Pathangi, AK Hüttel, HSJ Van der Zant Applied Physics Letters 93 (11), 2008 | 22 | 2008 |
| Using deep learning based defect detection and classification schemes for pixel level image quantification H Pathangi, S Meenakshisundaram, T Bansal US Patent 10,672,588, 2020 | 20 | 2020 |
| Quantifying the aggregation factor in carbon nanotube dispersions by absorption spectroscopy H Pathangi, PM Vereecken, A Klekachev, G Groeseneken, A Witvrouw Journal of Nanoscience 2014 (1), 328627, 2014 | 18 | 2014 |
| Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow H Pathangi, BT Chan, H Bayana, N Vandenbroeck, D Van Den Heuvel, ... Alternative Lithographic Technologies VII 9423, 106-120, 2015 | 16 | 2015 |
| DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC H Pathangi, V Vaid, BT Chan, N Vandenbroeck, J Li, SE Hong, Y Cao, ... Alternative Lithographic Technologies VIII 9777, 84-89, 2016 | 13 | 2016 |
| Dielectrophoretic assembly of suspended single-walled carbon nanotubes H Pathangi, G Groeseneken, A Witvrouw Microelectronic engineering 98, 218-221, 2012 | 13 | 2012 |
| Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations V Constantoudis, G Papavieros, E Gogolides, AV Pret, H Pathangi, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 16 (2), 024001-024001, 2017 | 11 | 2017 |
| Towards CMOS-compatible single-walled carbon nanotube resonators H Pathangi, V Cherman, A Khaled, B Soree, G Groeseneken, A Witvrouw Microelectronic engineering 107, 219-222, 2013 | 8 | 2013 |
| Improved cost-effectiveness of the block co-polymer anneal process for DSA H Pathangi, M Stokhof, W Knaepen, V Vaid, A Mallik, BT Chan, ... Alternative Lithographic Technologies VIII 9777, 415-419, 2016 | 7 | 2016 |
| Inspection-guided critical site selection for critical dimension measurement JC Saraswatula, Y Arpit, H Pathangi US Patent 11,035,666, 2021 | 3 | 2021 |
| Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations V Constantoudis, VKM Kuppuswamy, E Gogolides, AV Pret, H Pathangi, ... Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016 | 2 | 2016 |
| Optical defect inspection solution for EUV stochastics detection V Anantha, R Babulnath, V Kannan, G Sharma, S Kumar, K Sah, A Cross, ... Extreme Ultraviolet (EUV) Lithography XI 11323, 381-386, 2020 | 1 | 2020 |
| Opportunities and Challenges for DSA in Logic and Memory R Gronheid, A Singh, J Doise, C Boeckx, I Karageorgos, J Ryckaert, ... | 1 | 2016 |
| The use of eDR-71xx for DSA defect review and automated classification H Pathangi, D Van Den Heuvel, H Bayana, L Bouckou, J Brown, P Parisi, ... Metrology, Inspection, and Process Control for Microlithography XXIX 9424 …, 2015 | 1 | 2015 |
| Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes HS Pathangi US Patent 11,631,602, 2023 | | 2023 |
| Using absolute Z-height values for synergy between tools S Madhogarhia, HS Pathangi, R Bhat US Patent 11,600,497, 2023 | | 2023 |
| USING DEEP LEARNING-BASED ERROR DETECTION AND CLASSIFICATION METHODS TO QUANTIFY IMAGE AT THE PIXEL LEVEL H Pathangi, S MEENAKSHISUNDARAM, T BANSAL | | 2022 |
