| Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition P Poodt, DC Cameron, E Dickey, SM George, V Kuznetsov, GN Parsons, ... Journal of Vacuum Science & Technology A 30 (1), 2012 | 448 | 2012 |
| Low hydrogen content stoichiometric silicon nitride films deposited by plasma‐enhanced chemical vapor deposition GN Parsons, JH Souk, J Batey Journal of applied physics 70 (3), 1553-1560, 1991 | 279 | 1991 |
| Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification KA Arpin, MD Losego, AN Cloud, H Ning, J Mallek, NP Sergeant, L Zhu, ... Nature communications 4 (1), 2630, 2013 | 275 | 2013 |
| Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si (100) TM Klein, D Niu, WS Epling, W Li, DM Maher, CC Hobbs, RI Hegde, ... Applied Physics Letters 75 (25), 4001-4003, 1999 | 273 | 1999 |
| Ultra‐fast degradation of chemical warfare agents using MOF–nanofiber kebabs J Zhao, DT Lee, RW Yaga, MG Hall, HF Barton, IR Woodward, CJ Oldham, ... Angewandte Chemie 128 (42), 13418-13422, 2016 | 265 | 2016 |
| Area-selective deposition: fundamentals, applications, and future outlook GN Parsons, RD Clark Chemistry of Materials 32 (12), 4920-4953, 2020 | 250 | 2020 |
| Progress and future directions for atomic layer deposition and ALD-based chemistry GN Parsons, SM George, M Knez Mrs Bulletin 36 (11), 865-871, 2011 | 247 | 2011 |
| Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon JJ Chambers, GN Parsons Journal of Applied Physics 90 (2), 918-933, 2001 | 236 | 2001 |
| Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control Q Peng, XY Sun, JC Spagnola, GK Hyde, RJ Spontak, GN Parsons Nano letters 7 (3), 719-722, 2007 | 228 | 2007 |
| Mechanisms and reactions during atomic layer deposition on polymers GN Parsons, SE Atanasov, EC Dandley, CK Devine, B Gong, JS Jur, ... Coordination Chemistry Reviews 257 (23-24), 3323-3331, 2013 | 226 | 2013 |
| Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates CS Yang, LL Smith, CB Arthur, GN Parsons Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 213 | 2000 |
| “Zincone” zinc oxide− organic hybrid polymer thin films formed by molecular layer deposition Q Peng, B Gong, RM VanGundy, GN Parsons Chemistry of Materials 21 (5), 820-830, 2009 | 210 | 2009 |
| Catalytic “MOF-Cloth” Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation … DT Lee, J Zhao, GW Peterson, GN Parsons Chemistry of Materials 29 (11), 4894-4903, 2017 | 196 | 2017 |
| Facile conversion of hydroxy double salts to metal–organic frameworks using metal oxide particles and atomic layer deposition thin-film templates J Zhao, WT Nunn, PC Lemaire, Y Lin, MD Dickey, CJ Oldham, HJ Walls, ... Journal of the American Chemical Society 137 (43), 13756-13759, 2015 | 193 | 2015 |
| UiO-66-NH2 Metal–Organic Framework (MOF) Nucleation on TiO2, ZnO, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on … DT Lee, J Zhao, CJ Oldham, GW Peterson, GN Parsons ACS applied materials & interfaces 9 (51), 44847-44855, 2017 | 190 | 2017 |
| Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition KJ Park, JM Doub, T Gougousi, GN Parsons Applied Physics Letters 86 (5), 2005 | 183 | 2005 |
| High dielectric constant metal silicates formed by controlled metal-surface reactions GN Parsons, JJ Chambers, MJ Kelly US Patent 6,521,911, 2003 | 179 | 2003 |
| Temperature-dependent subsurface growth during atomic layer deposition on polypropylene and cellulose fibers JS Jur, JC Spagnola, K Lee, B Gong, Q Peng, GN Parsons Langmuir 26 (11), 8239-8244, 2010 | 178 | 2010 |
| Atomic layer deposition and abrupt wetting transitions on nonwoven polypropylene and woven cotton fabrics GK Hyde, G Scarel, JC Spagnola, Q Peng, K Lee, B Gong, KG Roberts, ... Langmuir 26 (4), 2550-2558, 2010 | 177 | 2010 |
| Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers JC Spagnola, B Gong, SA Arvidson, JS Jur, SA Khan, GN Parsons Journal of Materials Chemistry 20 (20), 4213-4222, 2010 | 171 | 2010 |
