Piezoresistive microcantilevers for humidity sensing J Xu, M Bertke, HS Wasisto, E Peiner Journal of Micromechanics and Microengineering 29 (5), 053003, 2019 | 80 | 2019 |
Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ... Sensors and Actuators B: Chemical 273, 276-287, 2018 | 70 | 2018 |
Piezoresistive Microcantilever with SAM-Modified ZnO-Nanorods@Silicon-Nanopillars for Room-Temperature Parts-per-Billion NO2 Detection J Xu, A Setiono, E Peiner ACS Applied Nano Materials 3 (7), 6609-6620, 2020 | 24 | 2020 |
In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection A Setiono, M Bertke, WO Nyang’au, J Xu, M Fahrbach, I Kirsch, E Uhde, ... Sensors 20 (3), 618, 2020 | 24 | 2020 |
Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang’au, HS Wasisto, ... Chemosensors 7 (1), 2, 2019 | 24 | 2019 |
Fabrication of ZnO nanorods on MEMS piezoresistive silicon microcantilevers for environmental monitoring J Xu, M Bertke, A Gad, F Yu, G Hamdana, A Bakin, E Peiner Proceedings 1 (4), 290, 2017 | 19 | 2017 |
Contact resonance spectroscopy for on-the-machine manufactory monitoring M Bertke, M Fahrbach, G Hamdana, J Xu, HS Wasisto, E Peiner Sensors and Actuators A: Physical 279, 501-508, 2018 | 16 | 2018 |
Piezoresistive silicon cantilever covered by ZnO nanorods for humidity sensing J Yang, J Xu, W Wu, M Bertke, HS Wasisto, E Peiner Procedia Engineering 168, 1114-1117, 2016 | 16 | 2016 |
Area-selective growth of aligned ZnO nanorod arrays for MEMS device applications J Xu, K Strempel, H Zhou, A Waag, M Bertke, A Schmidt, E Peiner Proceedings 2 (13), 887, 2018 | 14 | 2018 |
Comparative study of electroless copper film on different self-assembled monolayers modified ABS substrate J Xu, R Fan, J Wang, M Jia, X Xiong, F Wang International journal of molecular sciences 15 (4), 6412-6422, 2014 | 14 | 2014 |
Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection M Bertke, J Xu, A Setiono, I Kirsch, E Uhde, E Peiner Journal of Micromechanics and Microengineering 30 (1), 014001, 2019 | 13 | 2019 |
Strategy toward miniaturized, self-out-readable resonant cantilever and integrated electrostatic microchannel separator for highly sensitive airborne nanoparticle detection M Bertke, J Xu, M Fahrbach, A Setiono, HS Wasisto, E Peiner Sensors 19 (4), 901, 2019 | 12 | 2019 |
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement A Setiono, WO Nyang’au, M Fahrbach, J Xu, M Bertke, HS Wasisto, ... Journal of Micromechanics and Microengineering 29 (12), 124006, 2019 | 11 | 2019 |
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors A Setiono, M Fahrbach, J Xu, M Bertke, WO Nyang'au, G Hamdana, ... Journal of Sensors and Sensor Systems 8 (1), 37-48, 2019 | 11 | 2019 |
Self-actuating and self-sensing ZNO nanorods/chitosan coated piezoresistive silicon microcantilever for humidit Y sensing J Xu, M Bertke, X Li, H Mu, F Yu, A Schmidt, A Bakin, E Peiner 2018 IEEE Micro Electro Mechanical Systems (MEMS), 206-209, 2018 | 11 | 2018 |
Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever J Xu, M Bertke, X Li, A Gad, H Zhou, HS Wasisto, E Peiner Smart Sensors, Actuators, and MEMS VIII 10246, 67, 2017 | 8 | 2017 |
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing † J Xu, M Bertke, X Li, A Setiono, M Fahrbach, A Schmidt, E Peiner Proceedings 2 (13), 838, 2018 | 7 | 2018 |
Piezoresistive microcantilevers 3D-patterned using ZnO-Nanorods@ Silicon-nanopillars for room-temperature ethanol detection J Xu, A Setiono, M Bertke, K Strempel, N Markiewicz, A Schmidt, A Waag, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 6 | 2019 |
Phase characteristic optimization of resonant MEMS environmental sensors A Setiono, M Fahrbach, M Bertke, J Xu, G Hamdana, HS Wasisto, ... Sensors and Measuring Systems; 19th ITG/GMA-Symposium, 1-4, 2018 | 5 | 2018 |
Ultra Low Power Mass-Producible Gas Sensor Based on Efficient Self-Heated GaN Nanorods N Markiewicz, O Casals, MF Fatahilah, J Xu, A Schmidt, HS Wasisto, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 4 | 2019 |