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Yen-Chun Fu
Yen-Chun Fu
在 glasgow.ac.uk 的电子邮件经过验证
标题
引用次数
引用次数
年份
Comprehensive study of the Raman shifts of strained silicon and germanium
CY Peng, CF Huang, YC Fu, YH Yang, CY Lai, ST Chang, CW Liu
Journal of Applied Physics 105 (8), 2009
1022009
Nearly defect-free Ge gate-all-around FETs on Si substrates
SH Hsu, CL Chu, WH Tu, YC Fu, PJ Sung, HC Chang, YT Chen, LY Cho, ...
2011 International Electron Devices Meeting, 35.2. 1-35.2. 4, 2011
392011
High mobility high on/off ratio CV dispersion-free Ge n-MOSFETs and their strain response
YC Fu, W Hsu, YT Chen, HS Lan, CH Lee, HC Chang, HY Lee, GL Luo, ...
2010 International Electron Devices Meeting, 18.5. 1-18.5. 4, 2010
272010
The impact of forming gas annealing on the electrical characteristics of sulfur passivated Al2O3/In0. 53Ga0. 47As (110) metal-oxide-semiconductor capacitors
YC Fu, U Peralagu, DAJ Millar, J Lin, I Povey, X Li, S Monaghan, ...
Applied Physics Letters 110 (14), 2017
222017
Effects of applied mechanical uniaxial and biaxial tensile strain on the flatband voltage of (001),(110), and (111) metal–oxide–silicon capacitors
CY Peng, YJ Yang, YC Fu, CF Huang, ST Chang, CW Liu
IEEE transactions on electron devices 56 (8), 1736-1745, 2009
132009
Towards a Vertical and Damage Free Post-Etch InGaAs Fin Profile: Dry Etch Processing, Sidewall Damage Assessment and Mitigation Options
U Peralagu, X Li, O Ignatova, YC Fu, DAJ Millar, MJ Steer, IM Povey, ...
ECS Transactions 69 (5), 15, 2015
62015
Plasma processing of III-V materials for energy efficient electronics applications
I Thayne, X Li, D Millar, YC Fu, U Peralagu
Advanced Etch Technology for Nanopatterning VI 10149, 87-95, 2017
32017
Demonstration of genuine surface inversion for the p/n-In0. 3Ga0. 7Sb-Al2O3 MOS system with in situ H2 plasma cleaning
DAJ Millar, U Peralagu, X Li, MJ Steer, YC Fu, PK Hurley, IG Thayne
Applied Physics Letters 115 (23), 2019
12019
Characteristics of In0. 7Ga0. 3As MOS Capacitors Obtained using Hydrochloric Acid Treatment, Ammonium Sulfide Passivation, Methanol Treatment, and Forming Gas Annealing
ST Chung, YC Huang, YC Fu, YJ Lee, TS Chao
ECS Journal of Solid State Science and Technology 8 (9), P457, 2019
12019
Electrical and Chemical Analysis of the In-situ H2 Plasma Cleaned InGaSb-Al2O3 Interface
D Millar, S Supardan, S Peralagu, M Sousa, X Li, VR Dhanak, YC Fu, ...
12017
Improving the electrical properties of the In0. 3Ga0. 7Sb-Al2O3 interface via in-situ H2 plasma and TMA exposure
D Millar, U Peralagu, X Li, YC Fu, G Gaspar, PK Hurley, IG Thayne
20th INFOS conference, 2017
12017
First Demonstration of Cluster Tool Based ICP Etching of (100) and (110) InGaAs MOSCAPs Followed by In-Situ ALD Deposition of HfO2 Including Nitrogen and Hydrogen Plasma …
YC Fu, U Peralagu, X Li, O Ignatova, DAJ Millar, M Steer, R Droopad, ...
12015
A Study of In-situ X-ray Photoelectron Spectroscopy Surface Analysis in Development of Atomic Layer Etch for GaN/AlGaN Based Power Device Fabrication
X Li, D Hemakumara, YC Fu, D Moran, I Thayne
2019
The Impact of In-situ Hydrogen Plasma Passivation Prior to ALD HfO2 Deposition on the Electrical Properties of ICP Etched P-type InGaAs (110) MOSCAPs
YC Fu, X Li, U Peralagu, D Millar, M Steer, H Zhou, R Droopad, IG Thayne
2017
A Process Development on Inductively Coupled Plasma Reactive Ion Etching in Cl2/BCl3 Chemistry for Fabricating GaN-based Vertical Nanowires
X Li, YC Fu, IG Thayne
2017
Atomic layer etch processes developed in an ICP/RIE etching system for etching III-V compound semiconductor materials
X Li, YC Fu, S Peralagu, S Cho, K Floros, D Hemakumara, M Smith, ...
2017
Scaled HfO2/In0. 53Ga0. 47As MOSCAPs via Inserting TiN Caping Layer for III-V Low Power Device Application
YC Fu, X Li, U Peralagu, D Hemakumara, DAJ Millar, M Steer, IG Thayne
2017
Improving the electrical properties of the In0.3Ga0.7Sb-Al2O3 interface via in-situ H2 plasma and TMA exposure
D Millar, U Peralagu, X Li, YC Fu, G Gaspar, P Hurley, I Thayne
2017
The Impact of an HBr/Ar Atomic Layer Etch (ALE) Process for InGaAs Vertical Nanowire Diameter Reduction on the Interface Between InGaAs and In-situ ALD Deposited HfO2
X Li, YC Fu, DAJ Millar, U Peralagu, M Steer, IG Thayne
2016
Initial Investigation on the Impact of In Situ Hydrogen Plasma Exposure to the Interface Between Molecular Beam Epitaxially Grown P-Ga0.7In0.3Sb (100) and Thermal Atomic Layer …
D Millar, U Peralagu, YC Fu, X Li, M Steer, I Thayne
2016
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