A fully automated hot‐wall multiplasma‐monochamber reactor for thin film deposition P Roca i Cabarrocas, JB Chévrier, J Huc, A Lloret, JY Parey, JPM Schmitt Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9 (4 …, 1991 | 252 | 1991 |
Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements AF i Morral, PR i Cabarrocas, C Clerc Physical Review B 69 (12), 125307, 2004 | 201 | 2004 |
Influence of Cu as a catalyst on the properties of silicon nanowires synthesized by the vapour–solid–solid mechanism J Arbiol, B Kalache, PR i Cabarrocas, JR Morante, AF i Morral Nanotechnology 18 (30), 305606, 2007 | 189 | 2007 |
Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences P Roca i Cabarrocas, N Layadi, T Heitz, B Drévillon, I Solomon Applied Physics Letters 66 (26), 3609-3611, 1995 | 182 | 1995 |
Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma … N Layadi, PR i Cabarrocas, B Drévillon, I Solomon Physical Review B 52 (7), 5136, 1995 | 161 | 1995 |
High efficiency and stable hydrogenated amorphous silicon radial junction solar cells built on VLS-grown silicon nanowires S Misra, L Yu, M Foldyna, PR i Cabarrocas Solar Energy Materials and Solar Cells 118, 90-95, 2013 | 154 | 2013 |
Plasma-enhanced low temperature growth of silicon nanowires and hierarchical structures by using tin and indium catalysts L Yu, B O’Donnell, PJ Alet, S Conesa-Boj, F Peiro, J Arbiol, ... Nanotechnology 20 (22), 225604, 2009 | 153 | 2009 |
Ion bombardment effects on microcrystalline silicon growth mechanisms and on the film properties B Kalache, AI Kosarev, R Vanderhaghen, PR i Cabarrocas Journal of Applied physics 93 (2), 1262-1273, 2003 | 152 | 2003 |
Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films PR i Cabarrocas Journal of non-crystalline solids 266, 31-37, 2000 | 146 | 2000 |
Plasma texturing for silicon solar cells: From pyramids to inverted pyramids-like structures M Moreno, D Daineka, PR i Cabarrocas Solar Energy Materials and Solar Cells 94 (5), 733-737, 2010 | 125 | 2010 |
Experimental evidence for nanoparticle deposition in continuous argon–silane plasmas: Effects of silicon nanoparticles on film properties P Roca i Cabarrocas, P Gay, A Hadjadj Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (2 …, 1996 | 125 | 1996 |
Contribution of ions to the growth of amorphous, polymorphous, and microcrystalline silicon thin films EAG Hamers, A Fontcuberta i Morral, C Niikura, R Brenot, ... Journal of Applied Physics 88 (6), 3674-3688, 2000 | 124 | 2000 |
Incorporation and redistribution of impurities into silicon nanowires during metal-particle-assisted growth W Chen, L Yu, S Misra, Z Fan, P Pareige, G Patriarche, S Bouchoule, ... Nature communications 5 (1), 4134, 2014 | 121 | 2014 |
A-Si: H deposition from SiH4 and Si2H6 RF-discharges: Pressure and temperature dependence of film growth in relation to α-γ discharge transition J Perrin, PR i Cabarrocas, B Allain, JM Friedt Japanese journal of applied physics 27 (11R), 2041, 1988 | 117 | 1988 |
Midgap density of states in hydrogenated polymorphous silicon M Meaudre, R Meaudre, R Butté, S Vignoli, C Longeaud, JP Kleider, ... Journal of Applied Physics 86 (2), 946-950, 1999 | 112 | 1999 |
Atomic structure of the nanocrystalline Si particles appearing in nanostructured Si thin films produced in low-temperature radiofrequency plasmas G Viera, M Mikikian, E Bertran, PR Cabarrocas, L Boufendi Journal of Applied Physics 92 (8), 4684-4694, 2002 | 106 | 2002 |
I n situ investigation of the growth of rf glow‐discharge deposited amorphous germanium and silicon films AM Antoine, B Drevillon, P Roca i Cabarrocas Journal of applied physics 61 (7), 2501-2508, 1987 | 106 | 1987 |
Growth and optoelectronic properties of polymorphous silicon thin films PR i Cabarrocas, AF i Morral, Y Poissant Thin Solid Films 403, 39-46, 2002 | 104 | 2002 |
Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique P Roca i Cabarrocas, R Brenot, P Bulkin, R Vanderhaghen, B Drévillon, ... Journal of Applied Physics 86 (12), 7079-7082, 1999 | 104 | 1999 |
A review on plasma-assisted VLS synthesis of silicon nanowires and radial junction solar cells S Misra, L Yu, W Chen, M Foldyna, PR i Cabarrocas Journal of physics D: Applied physics 47 (39), 393001, 2014 | 103 | 2014 |