| Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ... Journal of Vacuum Science & Technology B 35 (6), 2017 | 100 | 2017 |
| Advanced electric-field scanning probe lithography on molecular resist using active cantilever M Kaestner, C Aydogan, T Ivanov, A Ahmad, T Angelov, A Reum, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031202-031202, 2015 | 49 | 2015 |
| Pattern-generation and pattern-transfer for single-digit nano devices IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 47 | 2016 |
| Scanning probes in nanostructure fabrication M Kaestner, T Ivanov, A Schuh, A Ahmad, T Angelov, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 32 (6), 2014 | 42 | 2014 |
| Large area fast-AFM scanning with active “Quattro” cantilever arrays A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 38 | 2016 |
| Field emission from diamond nanotips for scanning probe lithography M Hofmann, C Lenk, T Ivanov, IW Rangelow, A Reum, A Ahmad, M Holz, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 34 | 2018 |
| Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 31 | 2018 |
| Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode C Lenk, S Lenk, M Holz, E Guliyev, M Hofmann, T Ivanov, IW Rangelow, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 27 | 2018 |
| Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 25 | 2016 |
| Mix-and-match lithography and cryogenic etching for NIL template fabrication M Hofmann, L Weidenfeller, S Supreeti, S Mechold, M Holz, C Reuter, ... Microelectronic Engineering 224, 111234, 2020 | 24 | 2020 |
| Cu(OH)2 and CuO Nanorod Synthesis on Piezoresistive Cantilevers for the Selective Detection of Nitrogen Dioxide L Schlur, M Hofer, A Ahmad, K Bonnot, M Holz, D Spitzer Sensors 18 (4), 1108, 2018 | 22 | 2018 |
| Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching C Lenk, M Hofmann, S Lenk, M Kaestner, T Ivanov, Y Krivoshapkina, ... Microelectronic Engineering 192, 77-82, 2018 | 21 | 2018 |
| Field-emission scanning probe lithography tool for 150 mm wafer M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 19 | 2018 |
| Thermomechanically and electromagnetically actuated piezoresistive cantilevers for fast-scanning probe microscopy investigations W Majstrzyk, A Ahmad, T Ivanov, A Reum, T Angelow, M Holz, T Gotszalk, ... Sensors and Actuators A: Physical 276, 237-245, 2018 | 17 | 2018 |
| Tip-and laser-based nanofabrication up to 100 mm with sub-nanometre precision I Ortlepp, M Kühnel, M Hofmann, L Weidenfeller, J Kirchner, S Supreeti, ... Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020 …, 2020 | 14 | 2020 |
| Lights out! nano-scale topography imaging of sample surface in opaque liquid environments with coated active cantilever probes F Xia, C Yang, Y Wang, K Youcef-Toumi, C Reuter, T Ivanov, M Holz, ... Nanomaterials 9 (7), 1013, 2019 | 14 | 2019 |
| Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions IW Rangelow, C Lenk, M Hofmann, S Lenk, T Ivanov, A Ahmad, ... Novel Patterning Technologies 2018 10584, 13-25, 2018 | 14 | 2018 |
| Tip-based nano-manufacturing and-metrology T Gotszalk, G Jóźwiak, J Radojewski, T Fröhlich, R Füssl, E Manske, ... Journal of Vacuum Science & Technology B 37 (3), 2019 | 13 | 2019 |
| Correlative microscopy and nanofabrication with AFM integrated with SEM M Holz, C Reuter, A Ahmad, A Reum, M Hofmann, T Ivanov, IW Rangelow Microscopy Today 27 (6), 24-30, 2019 | 12 | 2019 |
| Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100) J Stauffenberg, I Ortlepp, U Blumröder, D Dontsov, C Schäffel, M Holz, ... tm-Technisches Messen 88 (9), 581-589, 2021 | 11 | 2021 |
