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Balamurugan Deivendran
Balamurugan Deivendran
PhD researcher at Ghent University
在 tcs.com 的电子邮件经过验证 - 首页
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3D Modeling and optimization of SiC deposition from CH3SiCl3/H2 in a commercial hot wall reactor
B Deivendran, VM Shinde, H Kumar, NE Prasad
Journal of Crystal Growth 554, 125944, 2021
142021
Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition
VM Shinde, B Deivendran, H Kumar, NE Prasad
Surface and Coatings Technology 425, 127685, 2021
132021
Virtual metrology for chemical mechanical planarization of semiconductor wafers
B Deivendran, VS Masampally, NRV Nadimpalli, V Runkana
Journal of Intelligent Manufacturing, 1-20, 2024
22024
Modeling Volatilization Flux of Semi-Volatile Organic Compounds from Soil
GB Jegadeesan, D Balamurugan, R Karthik, V Ananthanarayanan
Res J Pharm, Biol Chem Sci 7 (6), 2436-2445, 2016
12016
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