3D Modeling and optimization of SiC deposition from CH3SiCl3/H2 in a commercial hot wall reactor B Deivendran, VM Shinde, H Kumar, NE Prasad Journal of Crystal Growth 554, 125944, 2021 | 14 | 2021 |
Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition VM Shinde, B Deivendran, H Kumar, NE Prasad Surface and Coatings Technology 425, 127685, 2021 | 13 | 2021 |
Virtual metrology for chemical mechanical planarization of semiconductor wafers B Deivendran, VS Masampally, NRV Nadimpalli, V Runkana Journal of Intelligent Manufacturing, 1-20, 2024 | 2 | 2024 |
Modeling Volatilization Flux of Semi-Volatile Organic Compounds from Soil GB Jegadeesan, D Balamurugan, R Karthik, V Ananthanarayanan Res J Pharm, Biol Chem Sci 7 (6), 2436-2445, 2016 | 1 | 2016 |