Optically induced rotation of anisotropic micro‐objects fabricated by surface micromachining E Higurashi, H Ukita, H Tanaka, O Ohguchi Applied physics letters 64 (17), 2209-2210, 1994 | 295 | 1994 |
Low-temperature bonding of laser diode chips on silicon substrates using plasma activation of Au films E Higurashi, T Imamura, T Suga, R Sawada IEEE Photonics Technology Letters 19 (24), 1994-1996, 2007 | 155 | 2007 |
Au–Au surface-activated bonding and its application to optical microsensors with 3-D structure E Higurashi, D Chino, T Suga, R Sawada IEEE Journal of Selected Topics in Quantum Electronics 15 (5), 1500-1505, 2009 | 132 | 2009 |
An integrated laser blood flowmeter E Higurashi, R Sawada, T Ito Journal of lightwave technology 21 (3), 591, 2003 | 118 | 2003 |
Optically induced rotation of dissymmetrically shaped fluorinated polyimide micro-objects in optical traps E Higurashi, O Ohguchi, T Tamamura, H Ukita, R Sawada Journal of Applied Physics 82 (6), 2773-2779, 1997 | 100 | 1997 |
Optically induced angular alignment of trapped birefringent micro-objects by linearly polarized light E Higurashi, R Sawada, T Ito Physical Review E 59 (3), 3676, 1999 | 89 | 1999 |
Room-temperature bonding of vertical-cavity surface-emitting laser chips on Si substrates using Au microbumps in ambient air R Takigawa, E Higurashi, T Suga, R Sawada Applied Physics Express 1 (11), 112201, 2008 | 88 | 2008 |
Organism information detection device and sphygmomanometer Y Uenishi, E Higurashi, K Naganuma, S Sudo, J Shimada, K Aihara, ... US Patent App. 10/570,956, 2007 | 87 | 2007 |
Micro-mirror apparatus and production method therefor R Sawada, E Higurashi, T Maruno US Patent 6,431,714, 2002 | 68 | 2002 |
Comparison of argon and oxygen plasma treatments for ambient room-temperature wafer-scale au–au bonding using ultrathin au films M Yamamoto, T Matsumae, Y Kurashima, H Takagi, T Suga, T Itoh, ... Micromachines 10 (2), 119, 2019 | 64 | 2019 |
Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror I Ishikawa, R Sawada, E Higurashi, S Sanada, D Chino Sensors and Actuators A: Physical 138 (2), 269-275, 2007 | 61 | 2007 |
Low-temperature hermetic packaging for microsystems using Au–Au surface-activated bonding at atmospheric pressure S Yamamoto, E Higurashi, T Suga, R Sawada Journal of Micromechanics and Microengineering 22 (5), 055026, 2012 | 57 | 2012 |
Integrated microlaser Doppler velocimeter T Ito, R Sawada, E Higurashi Journal of lightwave technology 17 (1), 30-34, 1999 | 55 | 1999 |
Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method R Takigawa, E Higurashi, T Kawanishi, T Asano Optics express 22 (22), 27733-27738, 2014 | 54 | 2014 |
Optically induced rotation of a trapped micro-object about an axis perpendicular to the laser beam axis E Higurashi, R Sawada, T Ito Applied physics letters 72 (23), 2951-2953, 1998 | 52 | 1998 |
Surface activated bonding of GaAs and SiC wafers at room temperature for improved heat dissipation in high-power semiconductor lasers E Higurashi, K Okumura, K Nakasuji, T Suga Japanese Journal of Applied Physics 54 (3), 030207, 2015 | 51 | 2015 |
A three-dimensional MEMS optical switching module having 100 input and 100 output ports T Yamamoto, J Yamaguchi, N Takeuchi, A Shimizu, E Higurashi, ... IEEE Photonics Technology Letters 15 (10), 1360-1362, 2003 | 51 | 2003 |
Integrated laser Doppler blood flowmeter designed to enable wafer-level packaging Y Kimura, M Goma, A Onoe, E Higurashi, R Sawada IEEE Transactions on Biomedical Engineering 57 (8), 2026-2033, 2010 | 46 | 2010 |
Passive Alignment and Mounting of LiNbO Waveguide Chips on Si Substrates by Low-Temperature Solid-State Bonding of Au R Takigawa, E Higurashi, T Suga, T Kawanishi IEEE Journal of Selected Topics in Quantum Electronics 17 (3), 652-658, 2011 | 45 | 2011 |
Optically induced angular alignment of birefringent micro-objects by linear polarization E Higurashi, R Sawada, T Ito Applied physics letters 73 (21), 3034-3036, 1998 | 45 | 1998 |