Multiple-surface interferometry of highly reflective wafer by wavelength tuning Y Kim, K Hibino, R Hanayama, N Sugita, M Mitsuishi Optics Express 22 (18), 21145-21156, 2014 | 64 | 2014 |
Laser-assisted machining of zirconia ceramics using a diamond bur T Kizaki, Y Ito, S Tanabe, Y Kim, N Sugita, M Mitsuishi Procedia Cirp 42, 497-502, 2016 | 52 | 2016 |
Design of phase shifting algorithms: fringe contrast maximum Y Kim, K Hibino, N Sugita, M Mitsuishi Optics Express 22 (15), 18203-18213, 2014 | 52 | 2014 |
Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function Y Kim, K Hibino, N Sugita, M Mitsuishi Optics express 23 (25), 32869-32880, 2015 | 38 | 2015 |
Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry Y Kim, K Hibino, N Sugita, M Mitsuishi Applied Optics 54 (13), 4207-4213, 2015 | 38 | 2015 |
Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer Y Kim, K Hibino, N Sugita, M Mitsuishi Optics Express 23 (4), 4065-4073, 2015 | 34 | 2015 |
Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry Y Kim, K Hibino, N Sugita, M Mitsuishi Optics express 23 (17), 22928-22938, 2015 | 26 | 2015 |
Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry K Hibino, Y Kim, S Lee, Y Kondo, N Sugita, M Mitsuishi Optical review 19, 247-253, 2012 | 24 | 2012 |
Measurement of absolute optical thickness of mask glass by wavelength-tuning Fourier analysis Y Kim, K Hibino, N Sugita, M Mitsuishi Optics letters 40 (13), 3169-3172, 2015 | 20 | 2015 |
Interferometric profile measurement of optical-thickness by wavelength tuning with suppression of spatially uniform error Y Kim, K Hibino, M Mitsuishi Optics Express 26 (8), 10870-10878, 2018 | 17 | 2018 |
Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer Y Kim, K Hibino, N Sugita, M Mitsuishi Optics and Lasers in Engineering 51 (10), 1173-1178, 2013 | 17 | 2013 |
Simultaneous thickness variation and surface profiling of glass plates using Fizeau interferometer with elimination of offset phase error W Bae, Y Kim, YH Moon, K Hibino, N Sugita, M Mitsuishi Optics Communications 480, 126500, 2021 | 16 | 2021 |
Surface profilometry of silicon wafers using wavelength-tuned phase-shifting interferometry F Miao, S Ahn, YH Moon, Y Kim Journal of Mechanical Science and Technology 33, 5327-5335, 2019 | 16 | 2019 |
Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer Y Kim, K Hibino, N Sugita, M Mitsuishi Optics and Lasers in Engineering 86, 309-316, 2016 | 16 | 2016 |
Phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer Y Kim, N Sugita, M Mitsuishi Precision Engineering 48, 67-74, 2017 | 15 | 2017 |
Canceling the momentum in a phase-shifting algorithm to eliminate spatially uniform errors K Hibino, Y Kim Applied optics 55 (23), 6331-6335, 2016 | 13 | 2016 |
Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function Y Kim, N Sugita, M Mitsuishi Precision Engineering 45, 187-194, 2016 | 13 | 2016 |
Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error S Kim, Y Kim, SC Shin, K Hibino, N Sugita Optical Review 28, 48-57, 2021 | 12 | 2021 |
Thickness profiling of transparent plate using wavelength-tuned phase-shifting analysis Y Kim, Y Moon, K Hibino, M Mitsuishi Measurement 161, 107870, 2020 | 12 | 2020 |
Design and assessment of phase-shifting algorithms in optical interferometer S Kim, J Jeon, Y Kim, N Sugita, M Mitsuishi International Journal of Precision Engineering and Manufacturing-Green …, 2023 | 11 | 2023 |