Monolithic heterogeneous integration of 3D radio frequency L− C elements by self‐rolled‐up membrane nanotechnology Z Yang, MD Kraman, Z Zheng, H Zhao, J Zhang, S Gong, YV Shao, ... Advanced Functional Materials 30 (40), 2004034, 2020 | 47 | 2020 |
Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology W Huang, Z Yang, MD Kraman, Q Wang, Z Ou, MM Rojo, AS Yalamarthy, ... Science advances 6 (3), eaay4508, 2020 | 45 | 2020 |
β-Ga2O3 FinFETs with ultra-low hysteresis by plasma-free metal-assisted chemical etching HC Huang, Z Ren, AFM Anhar Uddin Bhuiyan, Z Feng, Z Yang, X Luo, ... Applied Physics Letters 121 (5), 2022 | 42 | 2022 |
Monolithic radio frequency SiNx self-rolled-up nanomembrane interdigital capacitor modeling and fabrication L Sang, H Zhou, Z Yang, MD Kraman, H Zhao, JA Michaels, DJ Sievers, ... Nanotechnology 30 (36), 364001, 2019 | 19 | 2019 |
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules A Khandelwal, N Athreya, MQ Tu, LL Janavicius, Z Yang, O Milenkovic, ... Microsystems & nanoengineering 8 (1), 27, 2022 | 15 | 2022 |
Self-rolled-up aluminum nitride-based 3D architectures enabled by record-high differential stress A Khandelwal, Z Ren, S Namiki, Z Yang, N Choudhary, C Li, P Wang, Z Mi, ... ACS Applied Materials & Interfaces 14 (25), 29014-29024, 2022 | 13 | 2022 |
Physical modeling of monolithic self-rolled-up microtube interdigital capacitors X Luo, Z Yang, M Kraman, L Sang, Y Zhang, X Li, W Huang IEEE Transactions on Components, Packaging and Manufacturing Technology 12 …, 2021 | 9 | 2021 |
S-Rum Inductors: 30-Fold Enhancement of Inductance by Controlled Electroplating Post Rolling Z Yang, A Khandelwal, A Wang, K Nguyen, S Wicker, YV Shao, X Li 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | 1 | 2024 |
High integration tunable capacitors on chip based on RAM technology Z Zhou, S Wang, X Wei, Z Yang, T Yuan, L Ma, B Zhou, L Sang, W He, ... 2023 International Conference on Microwave and Millimeter Wave Technology …, 2023 | 1 | 2023 |
Rolled-up electromagnetic component for on-chip applications and method of making a rolled-up electromagnetic component X Li, W Huang, Z Yang, MD Kraman, J Ni, Z Ou, Q Chen, JG Eden US Patent 11,031,456, 2021 | 1 | 2021 |
Unleashing the Performance of Self‐Rolled‐Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces (Adv. Mater. Technol. 10/2024) Z Yang, A Khandelwal, AT Wang, K Nguyen, S Wicker, YV Shao, X Li Advanced Materials Technologies 9 (10), 2470043, 2024 | | 2024 |
Tunable Ultra-Small Monolithically-Rolled-up Capacitors by Piezoelectric Actuation K Nguyen, Z Yang, A Wang, SA Wicker, X Li 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | | 2024 |
S-RuM Technology for Extreme Miniaturization and Integration of Passive Electronics and Microfluidics Z Yang, A Khandelwal, P Froeter, K Nguyen, AT Wang, SA Wicker, X Li 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | | 2024 |
Reconfigurable microwave device based on self-rolling interdigital microactuator S Wang, Z Zhou, K Wang, Z Yang, T Yuan, L Ma, B Zhou, L Sang, W He, ... 2023 International Conference on Microwave and Millimeter Wave Technology …, 2023 | | 2023 |
Electroplating Method for Enhancing the Performance of Rolled-Up Passive Components X Li, A Khandelwal, Z Yang US Patent App. 17/503,603, 2022 | | 2022 |
Rolled-up Magnetic Component For On-chip Applications And Method Of Making A Rolled-up Magnetic Component W Huang, JG Eden, X Li, Q Chen, Z Ou, J Ni, MD Kraman, Z Yang | | 2021 |
Chip scale monolithic integration of inductive and capacitive components by self-rolled-up membrane nanotechnology Z Yang University of Illinois at Urbana-Champaign, 2020 | | 2020 |