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| Evaluation of Optical Interferometry for Thickness Uniformity Control of Parylene HT Coating on Titanium Substrates S Riahi, G Bécan, M Ammar, A Bosseboeuf, F Laourine, B Boutaud, ... 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS …, 2024 | | 2024 |
